8/9/2011	9:21:50 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/9/2011	9:21:51 AM	Recipe started at 9:21 AM
8/9/2011	9:21:51 AM	Helium valve closed
8/9/2011	9:21:51 AM	H2 valve closed
8/9/2011	9:21:51 AM	BCl3 valve closed
8/9/2011	9:21:51 AM	PH3 valve closed
8/9/2011	9:21:51 AM	SiCl4 pre valve closed
8/9/2011	9:21:51 AM	SiCl4 post valve closed
8/9/2011	9:21:51 AM	Main Vac valve closed
8/9/2011	9:21:51 AM	Bypass valve closed
8/9/2011	9:21:51 AM	Bubbler valve closed
8/9/2011	9:21:51 AM	Helium MFC set to  0.000000
8/9/2011	9:21:51 AM	H2 MFC set to  0.000000
8/9/2011	9:21:51 AM	BCl3 MFC set to  0.000000
8/9/2011	9:21:51 AM	PHl3 MFC set to  0.000000
8/9/2011	9:21:51 AM	SiCl4 MFC set to  0.000000
8/9/2011	9:21:51 AM	Bypass solenoid MFC set to  0.000000
8/9/2011	9:21:51 AM	Tube furnace set to 0
8/9/2011	9:21:54 AM	H2 valve closed
8/9/2011	9:21:54 AM	BCl3 valve closed
8/9/2011	9:21:54 AM	PH3 valve closed
8/9/2011	9:21:54 AM	SiCl4 pre valve closed
8/9/2011	9:21:54 AM	SiCl4 post valve closed
8/9/2011	9:21:54 AM	Main Vac valve closed
8/9/2011	9:21:54 AM	Bypass valve closed
8/9/2011	9:21:54 AM	Bubbler valve closed
8/9/2011	9:21:54 AM	Helium valve opened
8/9/2011	9:21:54 AM	Helium MFC set to  500.000000
8/9/2011	9:21:54 AM	H2 MFC set to  0.000000
8/9/2011	9:21:54 AM	BCl3 MFC set to  0.000000
8/9/2011	9:21:54 AM	PHl3 MFC set to  0.000000
8/9/2011	9:21:54 AM	SiCl4 MFC set to  0.000000
8/9/2011	9:21:54 AM	Bypass solenoid MFC set to  0.000000
8/9/2011	9:21:54 AM	Tube furnace set to 0
8/9/2011	9:23:00 AM	Helium valve closed
8/9/2011	9:23:00 AM	H2 valve closed
8/9/2011	9:23:00 AM	BCl3 valve closed
8/9/2011	9:23:00 AM	PH3 valve closed
8/9/2011	9:23:00 AM	SiCl4 pre valve closed
8/9/2011	9:23:00 AM	SiCl4 post valve closed
8/9/2011	9:23:00 AM	Main Vac valve closed
8/9/2011	9:23:00 AM	Bypass valve closed
8/9/2011	9:23:00 AM	Bubbler valve closed
8/9/2011	9:23:00 AM	Helium MFC set to  0.000000
8/9/2011	9:23:00 AM	H2 MFC set to  0.000000
8/9/2011	9:23:00 AM	BCl3 MFC set to  0.000000
8/9/2011	9:23:00 AM	PHl3 MFC set to  0.000000
8/9/2011	9:23:00 AM	SiCl4 MFC set to  0.000000
8/9/2011	9:23:00 AM	Bypass solenoid MFC set to  0.000000
8/9/2011	9:23:00 AM	Tube furnace set to 0
8/9/2011	9:23:01 AM	Run finished at 9:23 AM
8/9/2011	9:23:01 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/9/2011	9:30:29 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/9/2011	9:30:30 AM	Recipe started at 9:30 AM
8/9/2011	9:30:30 AM	Helium valve closed
8/9/2011	9:30:30 AM	H2 valve closed
8/9/2011	9:30:30 AM	BCl3 valve closed
8/9/2011	9:30:30 AM	PH3 valve closed
8/9/2011	9:30:30 AM	SiCl4 pre valve closed
8/9/2011	9:30:30 AM	SiCl4 post valve closed
8/9/2011	9:30:30 AM	Main Vac valve closed
8/9/2011	9:30:30 AM	Bubbler valve closed
8/9/2011	9:30:30 AM	Bypass valve opened
8/9/2011	9:30:30 AM	Helium MFC set to  0.000000
8/9/2011	9:30:30 AM	H2 MFC set to  0.000000
8/9/2011	9:30:30 AM	BCl3 MFC set to  0.000000
8/9/2011	9:30:30 AM	PHl3 MFC set to  0.000000
8/9/2011	9:30:30 AM	SiCl4 MFC set to  0.000000
8/9/2011	9:30:30 AM	Bypass solenoid MFC set to  0.000000
8/9/2011	9:30:30 AM	Tube furnace set to 0
8/9/2011	9:31:46 AM	Helium valve closed
8/9/2011	9:31:46 AM	H2 valve closed
8/9/2011	9:31:46 AM	BCl3 valve closed
8/9/2011	9:31:46 AM	PH3 valve closed
8/9/2011	9:31:46 AM	SiCl4 pre valve closed
8/9/2011	9:31:46 AM	SiCl4 post valve closed
8/9/2011	9:31:46 AM	Main Vac valve closed
8/9/2011	9:31:46 AM	Bubbler valve closed
8/9/2011	9:31:46 AM	Bypass valve opened
8/9/2011	9:31:46 AM	Helium MFC set to  0.000000
8/9/2011	9:31:46 AM	H2 MFC set to  0.000000
8/9/2011	9:31:46 AM	BCl3 MFC set to  0.000000
8/9/2011	9:31:46 AM	PHl3 MFC set to  0.000000
8/9/2011	9:31:46 AM	SiCl4 MFC set to  0.000000
8/9/2011	9:31:46 AM	Bypass solenoid MFC set to  0.000000
8/9/2011	9:31:47 AM	Tube furnace set to 0
8/9/2011	9:32:47 AM	Helium valve closed
8/9/2011	9:32:47 AM	H2 valve closed
8/9/2011	9:32:47 AM	BCl3 valve closed
8/9/2011	9:32:47 AM	PH3 valve closed
8/9/2011	9:32:47 AM	SiCl4 pre valve closed
8/9/2011	9:32:47 AM	SiCl4 post valve closed
8/9/2011	9:32:47 AM	Bypass valve closed
8/9/2011	9:32:47 AM	Bubbler valve closed
8/9/2011	9:32:47 AM	Main Vac valve opened
8/9/2011	9:32:47 AM	Helium MFC set to  0.000000
8/9/2011	9:32:47 AM	H2 MFC set to  0.000000
8/9/2011	9:32:47 AM	BCl3 MFC set to  0.000000
8/9/2011	9:32:47 AM	PHl3 MFC set to  0.000000
8/9/2011	9:32:47 AM	SiCl4 MFC set to  0.000000
8/9/2011	9:32:47 AM	Bypass solenoid MFC set to  0.000000
8/9/2011	9:32:47 AM	Tube furnace set to 0
8/9/2011	9:32:48 AM	Run finished at 9:32 AM
8/9/2011	9:32:48 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/9/2011	9:33:27 AM	Main Vac valve closed
8/9/2011	9:33:37 AM	Main Vac valve opened
8/9/2011	9:34:04 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
8/9/2011	9:34:16 AM	Recipe started at 9:34 AM
8/9/2011	9:34:16 AM	Helium valve closed
8/9/2011	9:34:16 AM	H2 valve closed
8/9/2011	9:34:16 AM	BCl3 valve closed
8/9/2011	9:34:16 AM	PH3 valve closed
8/9/2011	9:34:16 AM	SiCl4 pre valve closed
8/9/2011	9:34:16 AM	SiCl4 post valve closed
8/9/2011	9:34:16 AM	Main Vac valve closed
8/9/2011	9:34:16 AM	Bubbler valve closed
8/9/2011	9:34:16 AM	Bypass valve opened
8/9/2011	9:34:16 AM	Helium MFC set to  0.000000
8/9/2011	9:34:16 AM	H2 MFC set to  0.000000
8/9/2011	9:34:16 AM	BCl3 MFC set to  0.000000
8/9/2011	9:34:16 AM	PHl3 MFC set to  0.000000
8/9/2011	9:34:16 AM	SiCl4 MFC set to  0.000000
8/9/2011	9:34:16 AM	Bypass solenoid MFC set to  0.000000
8/9/2011	9:34:16 AM	Tube furnace set to 0
8/9/2011	9:34:17 AM	Helium valve closed
8/9/2011	9:34:17 AM	H2 valve closed
8/9/2011	9:34:17 AM	BCl3 valve closed
8/9/2011	9:34:17 AM	PH3 valve closed
8/9/2011	9:34:17 AM	SiCl4 pre valve closed
8/9/2011	9:34:17 AM	SiCl4 post valve closed
8/9/2011	9:34:17 AM	Main Vac valve closed
8/9/2011	9:34:17 AM	Bubbler valve closed
8/9/2011	9:34:17 AM	Bypass valve opened
8/9/2011	9:34:17 AM	Helium MFC set to  0.000000
8/9/2011	9:34:17 AM	H2 MFC set to  0.000000
8/9/2011	9:34:17 AM	BCl3 MFC set to  0.000000
8/9/2011	9:34:17 AM	PHl3 MFC set to  0.000000
8/9/2011	9:34:17 AM	SiCl4 MFC set to  0.000000
8/9/2011	9:34:17 AM	Bypass solenoid MFC set to  0.000000
8/9/2011	9:34:17 AM	Tube furnace set to 0
8/9/2011	9:34:47 AM	Helium valve closed
8/9/2011	9:34:47 AM	H2 valve closed
8/9/2011	9:34:47 AM	BCl3 valve closed
8/9/2011	9:34:47 AM	PH3 valve closed
8/9/2011	9:34:47 AM	SiCl4 pre valve closed
8/9/2011	9:34:47 AM	SiCl4 post valve closed
8/9/2011	9:34:47 AM	Bypass valve closed
8/9/2011	9:34:47 AM	Bubbler valve closed
8/9/2011	9:34:47 AM	Main Vac valve opened
8/9/2011	9:34:47 AM	Helium MFC set to  0.000000
8/9/2011	9:34:47 AM	H2 MFC set to  0.000000
8/9/2011	9:34:47 AM	BCl3 MFC set to  0.000000
8/9/2011	9:34:47 AM	PHl3 MFC set to  0.000000
8/9/2011	9:34:47 AM	SiCl4 MFC set to  0.000000
8/9/2011	9:34:47 AM	Bypass solenoid MFC set to  0.000000
8/9/2011	9:34:47 AM	Tube furnace set to 0
8/9/2011	9:35:17 AM	H2 valve closed
8/9/2011	9:35:17 AM	BCl3 valve closed
8/9/2011	9:35:17 AM	PH3 valve closed
8/9/2011	9:35:17 AM	SiCl4 pre valve closed
8/9/2011	9:35:17 AM	SiCl4 post valve closed
8/9/2011	9:35:17 AM	Bypass valve closed
8/9/2011	9:35:17 AM	Bubbler valve closed
8/9/2011	9:35:17 AM	Helium valve opened
8/9/2011	9:35:17 AM	Main Vac valve opened
8/9/2011	9:35:17 AM	Helium MFC set to  20.000000
8/9/2011	9:35:17 AM	H2 MFC set to  0.000000
8/9/2011	9:35:17 AM	BCl3 MFC set to  0.000000
8/9/2011	9:35:17 AM	PHl3 MFC set to  0.000000
8/9/2011	9:35:17 AM	SiCl4 MFC set to  0.000000
8/9/2011	9:35:17 AM	Bypass solenoid MFC set to  0.000000
8/9/2011	9:35:17 AM	Tube furnace set to 0
8/9/2011	9:35:47 AM	Helium valve closed
8/9/2011	9:35:47 AM	H2 valve closed
8/9/2011	9:35:47 AM	BCl3 valve closed
8/9/2011	9:35:47 AM	PH3 valve closed
8/9/2011	9:35:47 AM	SiCl4 pre valve closed
8/9/2011	9:35:47 AM	SiCl4 post valve closed
8/9/2011	9:35:47 AM	Bypass valve closed
8/9/2011	9:35:47 AM	Bubbler valve closed
8/9/2011	9:35:47 AM	Main Vac valve opened
8/9/2011	9:35:47 AM	Helium MFC set to  0.000000
8/9/2011	9:35:47 AM	H2 MFC set to  0.000000
8/9/2011	9:35:47 AM	BCl3 MFC set to  0.000000
8/9/2011	9:35:47 AM	PHl3 MFC set to  0.000000
8/9/2011	9:35:47 AM	SiCl4 MFC set to  0.000000
8/9/2011	9:35:47 AM	Bypass solenoid MFC set to  0.000000
8/9/2011	9:35:47 AM	Tube furnace set to 0
8/9/2011	9:36:17 AM	H2 valve closed
8/9/2011	9:36:17 AM	BCl3 valve closed
8/9/2011	9:36:17 AM	PH3 valve closed
8/9/2011	9:36:17 AM	SiCl4 pre valve closed
8/9/2011	9:36:17 AM	SiCl4 post valve closed
8/9/2011	9:36:17 AM	Bypass valve closed
8/9/2011	9:36:17 AM	Bubbler valve closed
8/9/2011	9:36:17 AM	Helium valve opened
8/9/2011	9:36:17 AM	Main Vac valve opened
8/9/2011	9:36:17 AM	Helium MFC set to  20.000000
8/9/2011	9:36:17 AM	H2 MFC set to  0.000000
8/9/2011	9:36:17 AM	BCl3 MFC set to  0.000000
8/9/2011	9:36:17 AM	PHl3 MFC set to  0.000000
8/9/2011	9:36:17 AM	SiCl4 MFC set to  0.000000
8/9/2011	9:36:17 AM	Bypass solenoid MFC set to  0.000000
8/9/2011	9:36:18 AM	Tube furnace set to 0
8/9/2011	9:36:35 AM	Helium valve closed
8/9/2011	9:36:35 AM	H2 valve closed
8/9/2011	9:36:35 AM	BCl3 valve closed
8/9/2011	9:36:35 AM	PH3 valve closed
8/9/2011	9:36:35 AM	SiCl4 pre valve closed
8/9/2011	9:36:35 AM	SiCl4 post valve closed
8/9/2011	9:36:35 AM	Bypass valve closed
8/9/2011	9:36:35 AM	Bubbler valve closed
8/9/2011	9:36:35 AM	Main Vac valve opened
8/9/2011	9:36:35 AM	Helium MFC set to  0.000000
8/9/2011	9:36:35 AM	H2 MFC set to  0.000000
8/9/2011	9:36:35 AM	BCl3 MFC set to  0.000000
8/9/2011	9:36:35 AM	PHl3 MFC set to  0.000000
8/9/2011	9:36:35 AM	SiCl4 MFC set to  0.000000
8/9/2011	9:36:35 AM	Bypass solenoid MFC set to  0.000000
8/9/2011	9:36:35 AM	Tube furnace set to 0
8/9/2011	9:37:05 AM	H2 valve closed
8/9/2011	9:37:05 AM	BCl3 valve closed
8/9/2011	9:37:05 AM	PH3 valve closed
8/9/2011	9:37:05 AM	SiCl4 pre valve closed
8/9/2011	9:37:05 AM	SiCl4 post valve closed
8/9/2011	9:37:05 AM	Bypass valve closed
8/9/2011	9:37:05 AM	Bubbler valve closed
8/9/2011	9:37:05 AM	Helium valve opened
8/9/2011	9:37:05 AM	Main Vac valve opened
8/9/2011	9:37:05 AM	Helium MFC set to  20.000000
8/9/2011	9:37:05 AM	H2 MFC set to  0.000000
8/9/2011	9:37:05 AM	BCl3 MFC set to  0.000000
8/9/2011	9:37:05 AM	PHl3 MFC set to  0.000000
8/9/2011	9:37:05 AM	SiCl4 MFC set to  0.000000
8/9/2011	9:37:05 AM	Bypass solenoid MFC set to  0.000000
8/9/2011	9:37:05 AM	Tube furnace set to 0
8/9/2011	9:37:09 AM	Helium valve closed
8/9/2011	9:37:09 AM	H2 valve closed
8/9/2011	9:37:09 AM	BCl3 valve closed
8/9/2011	9:37:09 AM	PH3 valve closed
8/9/2011	9:37:09 AM	SiCl4 pre valve closed
8/9/2011	9:37:09 AM	SiCl4 post valve closed
8/9/2011	9:37:09 AM	Bypass valve closed
8/9/2011	9:37:09 AM	Bubbler valve closed
8/9/2011	9:37:09 AM	Main Vac valve opened
8/9/2011	9:37:09 AM	Helium MFC set to  0.000000
8/9/2011	9:37:09 AM	H2 MFC set to  0.000000
8/9/2011	9:37:09 AM	BCl3 MFC set to  0.000000
8/9/2011	9:37:09 AM	PHl3 MFC set to  0.000000
8/9/2011	9:37:09 AM	SiCl4 MFC set to  0.000000
8/9/2011	9:37:09 AM	Bypass solenoid MFC set to  0.000000
8/9/2011	9:37:09 AM	Tube furnace set to 0
8/9/2011	9:37:13 AM	Run aborted at 9:37 AM
8/9/2011	9:37:13 AM	Helium valve closed
8/9/2011	9:37:13 AM	H2 valve closed
8/9/2011	9:37:13 AM	BCl3 valve closed
8/9/2011	9:37:13 AM	PH3 valve closed
8/9/2011	9:37:13 AM	SiCl4 pre valve closed
8/9/2011	9:37:13 AM	SiCl4 post valve closed
8/9/2011	9:37:13 AM	Bypass valve closed
8/9/2011	9:37:13 AM	Main Vac valve closed
8/9/2011	9:37:13 AM	Bubbler valve closed
8/9/2011	9:37:13 AM	Helium MFC set to  0.000000
8/9/2011	9:37:13 AM	H2 MFC set to  0.000000
8/9/2011	9:37:13 AM	BCl3 MFC set to  0.000000
8/9/2011	9:37:13 AM	PHl3 MFC set to  0.000000
8/9/2011	9:37:13 AM	SiCl4 MFC set to  0.000000
8/9/2011	9:37:14 AM	Tube furnace set to 0
8/9/2011	9:37:14 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
8/9/2011	9:37:17 AM	Main Vac valve opened
8/9/2011	10:02:26 AM	Recipe started at 10:02 AM
8/9/2011	10:02:26 AM	Helium valve closed
8/9/2011	10:02:26 AM	H2 valve closed
8/9/2011	10:02:26 AM	BCl3 valve closed
8/9/2011	10:02:26 AM	PH3 valve closed
8/9/2011	10:02:26 AM	SiCl4 pre valve closed
8/9/2011	10:02:26 AM	SiCl4 post valve closed
8/9/2011	10:02:26 AM	Bypass valve closed
8/9/2011	10:02:26 AM	Bubbler valve closed
8/9/2011	10:02:26 AM	Main Vac valve opened
8/9/2011	10:02:26 AM	Helium MFC set to  0.000000
8/9/2011	10:02:26 AM	H2 MFC set to  0.000000
8/9/2011	10:02:26 AM	BCl3 MFC set to  0.000000
8/9/2011	10:02:26 AM	PHl3 MFC set to  0.000000
8/9/2011	10:02:26 AM	SiCl4 MFC set to  0.000000
8/9/2011	10:02:26 AM	Bypass solenoid MFC set to  0.000000
8/9/2011	10:02:26 AM	Tube furnace set to 100
8/9/2011	10:02:56 AM	H2 valve closed
8/9/2011	10:02:56 AM	BCl3 valve closed
8/9/2011	10:02:56 AM	PH3 valve closed
8/9/2011	10:02:56 AM	SiCl4 pre valve closed
8/9/2011	10:02:56 AM	SiCl4 post valve closed
8/9/2011	10:02:56 AM	Bypass valve closed
8/9/2011	10:02:56 AM	Bubbler valve closed
8/9/2011	10:02:56 AM	Helium valve opened
8/9/2011	10:02:56 AM	Main Vac valve opened
8/9/2011	10:02:56 AM	Helium MFC set to  20.000000
8/9/2011	10:02:56 AM	H2 MFC set to  0.000000
8/9/2011	10:02:56 AM	BCl3 MFC set to  0.000000
8/9/2011	10:02:56 AM	PHl3 MFC set to  0.000000
8/9/2011	10:02:56 AM	SiCl4 MFC set to  0.000000
8/9/2011	10:02:56 AM	Bypass solenoid MFC set to  0.000000
8/9/2011	10:02:56 AM	Tube furnace set to 100
8/9/2011	10:03:26 AM	Helium valve closed
8/9/2011	10:03:26 AM	H2 valve closed
8/9/2011	10:03:26 AM	BCl3 valve closed
8/9/2011	10:03:26 AM	PH3 valve closed
8/9/2011	10:03:26 AM	SiCl4 pre valve closed
8/9/2011	10:03:26 AM	SiCl4 post valve closed
8/9/2011	10:03:26 AM	Bypass valve closed
8/9/2011	10:03:26 AM	Bubbler valve closed
8/9/2011	10:03:26 AM	Main Vac valve opened
8/9/2011	10:03:26 AM	Helium MFC set to  0.000000
8/9/2011	10:03:26 AM	H2 MFC set to  0.000000
8/9/2011	10:03:26 AM	BCl3 MFC set to  0.000000
8/9/2011	10:03:26 AM	PHl3 MFC set to  0.000000
8/9/2011	10:03:26 AM	SiCl4 MFC set to  0.000000
8/9/2011	10:03:26 AM	Bypass solenoid MFC set to  0.000000
8/9/2011	10:03:27 AM	Tube furnace set to 100
8/9/2011	10:03:57 AM	H2 valve closed
8/9/2011	10:03:57 AM	BCl3 valve closed
8/9/2011	10:03:57 AM	PH3 valve closed
8/9/2011	10:03:57 AM	SiCl4 pre valve closed
8/9/2011	10:03:57 AM	SiCl4 post valve closed
8/9/2011	10:03:57 AM	Bypass valve closed
8/9/2011	10:03:57 AM	Bubbler valve closed
8/9/2011	10:03:57 AM	Helium valve opened
8/9/2011	10:03:57 AM	Main Vac valve opened
8/9/2011	10:03:57 AM	Helium MFC set to  20.000000
8/9/2011	10:03:57 AM	H2 MFC set to  0.000000
8/9/2011	10:03:57 AM	BCl3 MFC set to  0.000000
8/9/2011	10:03:57 AM	PHl3 MFC set to  0.000000
8/9/2011	10:03:57 AM	SiCl4 MFC set to  0.000000
8/9/2011	10:03:57 AM	Bypass solenoid MFC set to  0.000000
8/9/2011	10:03:57 AM	Tube furnace set to 100
8/9/2011	10:04:27 AM	Helium valve closed
8/9/2011	10:04:27 AM	H2 valve closed
8/9/2011	10:04:27 AM	BCl3 valve closed
8/9/2011	10:04:27 AM	PH3 valve closed
8/9/2011	10:04:27 AM	SiCl4 pre valve closed
8/9/2011	10:04:27 AM	SiCl4 post valve closed
8/9/2011	10:04:27 AM	Bypass valve closed
8/9/2011	10:04:27 AM	Bubbler valve closed
8/9/2011	10:04:27 AM	Main Vac valve opened
8/9/2011	10:04:27 AM	Helium MFC set to  0.000000
8/9/2011	10:04:27 AM	H2 MFC set to  0.000000
8/9/2011	10:04:27 AM	BCl3 MFC set to  0.000000
8/9/2011	10:04:27 AM	PHl3 MFC set to  0.000000
8/9/2011	10:04:27 AM	SiCl4 MFC set to  0.000000
8/9/2011	10:04:27 AM	Bypass solenoid MFC set to  0.000000
8/9/2011	10:04:27 AM	Tube furnace set to 100
8/9/2011	10:04:57 AM	H2 valve closed
8/9/2011	10:04:57 AM	BCl3 valve closed
8/9/2011	10:04:57 AM	PH3 valve closed
8/9/2011	10:04:57 AM	SiCl4 pre valve closed
8/9/2011	10:04:57 AM	SiCl4 post valve closed
8/9/2011	10:04:57 AM	Bypass valve closed
8/9/2011	10:04:57 AM	Bubbler valve closed
8/9/2011	10:04:57 AM	Helium valve opened
8/9/2011	10:04:57 AM	Main Vac valve opened
8/9/2011	10:04:57 AM	Helium MFC set to  20.000000
8/9/2011	10:04:57 AM	H2 MFC set to  0.000000
8/9/2011	10:04:57 AM	BCl3 MFC set to  0.000000
8/9/2011	10:04:57 AM	PHl3 MFC set to  0.000000
8/9/2011	10:04:57 AM	SiCl4 MFC set to  0.000000
8/9/2011	10:04:57 AM	Bypass solenoid MFC set to  0.000000
8/9/2011	10:04:57 AM	Tube furnace set to 100
8/9/2011	10:05:27 AM	Helium valve closed
8/9/2011	10:05:27 AM	H2 valve closed
8/9/2011	10:05:27 AM	BCl3 valve closed
8/9/2011	10:05:27 AM	PH3 valve closed
8/9/2011	10:05:27 AM	SiCl4 pre valve closed
8/9/2011	10:05:27 AM	SiCl4 post valve closed
8/9/2011	10:05:27 AM	Bypass valve closed
8/9/2011	10:05:27 AM	Bubbler valve closed
8/9/2011	10:05:27 AM	Main Vac valve opened
8/9/2011	10:05:27 AM	Helium MFC set to  0.000000
8/9/2011	10:05:27 AM	H2 MFC set to  0.000000
8/9/2011	10:05:27 AM	BCl3 MFC set to  0.000000
8/9/2011	10:05:27 AM	PHl3 MFC set to  0.000000
8/9/2011	10:05:27 AM	SiCl4 MFC set to  0.000000
8/9/2011	10:05:27 AM	Bypass solenoid MFC set to  0.000000
8/9/2011	10:05:27 AM	Tube furnace set to 100
8/9/2011	10:05:57 AM	H2 valve closed
8/9/2011	10:05:57 AM	BCl3 valve closed
8/9/2011	10:05:57 AM	PH3 valve closed
8/9/2011	10:05:57 AM	SiCl4 pre valve closed
8/9/2011	10:05:57 AM	SiCl4 post valve closed
8/9/2011	10:05:57 AM	Bypass valve closed
8/9/2011	10:05:57 AM	Bubbler valve closed
8/9/2011	10:05:57 AM	Helium valve opened
8/9/2011	10:05:57 AM	Main Vac valve opened
8/9/2011	10:05:57 AM	Helium MFC set to  20.000000
8/9/2011	10:05:57 AM	H2 MFC set to  0.000000
8/9/2011	10:05:57 AM	BCl3 MFC set to  0.000000
8/9/2011	10:05:57 AM	PHl3 MFC set to  0.000000
8/9/2011	10:05:57 AM	SiCl4 MFC set to  0.000000
8/9/2011	10:05:57 AM	Bypass solenoid MFC set to  0.000000
8/9/2011	10:05:58 AM	Tube furnace set to 100
8/9/2011	10:06:28 AM	Helium valve closed
8/9/2011	10:06:28 AM	H2 valve closed
8/9/2011	10:06:28 AM	BCl3 valve closed
8/9/2011	10:06:28 AM	PH3 valve closed
8/9/2011	10:06:28 AM	SiCl4 pre valve closed
8/9/2011	10:06:28 AM	SiCl4 post valve closed
8/9/2011	10:06:28 AM	Bypass valve closed
8/9/2011	10:06:28 AM	Bubbler valve closed
8/9/2011	10:06:28 AM	Main Vac valve opened
8/9/2011	10:06:28 AM	Helium MFC set to  0.000000
8/9/2011	10:06:28 AM	H2 MFC set to  0.000000
8/9/2011	10:06:28 AM	BCl3 MFC set to  0.000000
8/9/2011	10:06:28 AM	PHl3 MFC set to  0.000000
8/9/2011	10:06:28 AM	SiCl4 MFC set to  0.000000
8/9/2011	10:06:28 AM	Bypass solenoid MFC set to  0.000000
8/9/2011	10:06:28 AM	Tube furnace set to 100
8/9/2011	10:06:58 AM	H2 valve closed
8/9/2011	10:06:58 AM	BCl3 valve closed
8/9/2011	10:06:58 AM	PH3 valve closed
8/9/2011	10:06:58 AM	SiCl4 pre valve closed
8/9/2011	10:06:58 AM	SiCl4 post valve closed
8/9/2011	10:06:58 AM	Bypass valve closed
8/9/2011	10:06:58 AM	Bubbler valve closed
8/9/2011	10:06:58 AM	Helium valve opened
8/9/2011	10:06:58 AM	Main Vac valve opened
8/9/2011	10:06:58 AM	Helium MFC set to  20.000000
8/9/2011	10:06:58 AM	H2 MFC set to  0.000000
8/9/2011	10:06:58 AM	BCl3 MFC set to  0.000000
8/9/2011	10:06:58 AM	PHl3 MFC set to  0.000000
8/9/2011	10:06:58 AM	SiCl4 MFC set to  0.000000
8/9/2011	10:06:58 AM	Bypass solenoid MFC set to  0.000000
8/9/2011	10:06:58 AM	Tube furnace set to 100
8/9/2011	10:07:28 AM	Helium valve closed
8/9/2011	10:07:28 AM	H2 valve closed
8/9/2011	10:07:28 AM	BCl3 valve closed
8/9/2011	10:07:28 AM	PH3 valve closed
8/9/2011	10:07:28 AM	SiCl4 pre valve closed
8/9/2011	10:07:28 AM	SiCl4 post valve closed
8/9/2011	10:07:28 AM	Bypass valve closed
8/9/2011	10:07:28 AM	Bubbler valve closed
8/9/2011	10:07:28 AM	Main Vac valve opened
8/9/2011	10:07:28 AM	Helium MFC set to  0.000000
8/9/2011	10:07:28 AM	H2 MFC set to  0.000000
8/9/2011	10:07:28 AM	BCl3 MFC set to  0.000000
8/9/2011	10:07:28 AM	PHl3 MFC set to  0.000000
8/9/2011	10:07:28 AM	SiCl4 MFC set to  0.000000
8/9/2011	10:07:28 AM	Bypass solenoid MFC set to  0.000000
8/9/2011	10:07:28 AM	Tube furnace set to 100
8/9/2011	10:07:58 AM	H2 valve closed
8/9/2011	10:07:58 AM	BCl3 valve closed
8/9/2011	10:07:58 AM	PH3 valve closed
8/9/2011	10:07:58 AM	SiCl4 pre valve closed
8/9/2011	10:07:58 AM	SiCl4 post valve closed
8/9/2011	10:07:58 AM	Bypass valve closed
8/9/2011	10:07:58 AM	Bubbler valve closed
8/9/2011	10:07:58 AM	Helium valve opened
8/9/2011	10:07:58 AM	Main Vac valve opened
8/9/2011	10:07:58 AM	Helium MFC set to  20.000000
8/9/2011	10:07:58 AM	H2 MFC set to  0.000000
8/9/2011	10:07:58 AM	BCl3 MFC set to  0.000000
8/9/2011	10:07:58 AM	PHl3 MFC set to  0.000000
8/9/2011	10:07:58 AM	SiCl4 MFC set to  0.000000
8/9/2011	10:07:58 AM	Bypass solenoid MFC set to  0.000000
8/9/2011	10:07:58 AM	Tube furnace set to 100
8/9/2011	10:08:28 AM	Helium valve closed
8/9/2011	10:08:28 AM	H2 valve closed
8/9/2011	10:08:28 AM	BCl3 valve closed
8/9/2011	10:08:28 AM	PH3 valve closed
8/9/2011	10:08:28 AM	SiCl4 pre valve closed
8/9/2011	10:08:28 AM	SiCl4 post valve closed
8/9/2011	10:08:28 AM	Bypass valve closed
8/9/2011	10:08:28 AM	Bubbler valve closed
8/9/2011	10:08:28 AM	Main Vac valve opened
8/9/2011	10:08:28 AM	Helium MFC set to  0.000000
8/9/2011	10:08:28 AM	H2 MFC set to  0.000000
8/9/2011	10:08:28 AM	BCl3 MFC set to  0.000000
8/9/2011	10:08:28 AM	PHl3 MFC set to  0.000000
8/9/2011	10:08:28 AM	SiCl4 MFC set to  0.000000
8/9/2011	10:08:28 AM	Bypass solenoid MFC set to  0.000000
8/9/2011	10:08:29 AM	Tube furnace set to 100
8/9/2011	10:08:59 AM	H2 valve closed
8/9/2011	10:08:59 AM	BCl3 valve closed
8/9/2011	10:08:59 AM	PH3 valve closed
8/9/2011	10:08:59 AM	SiCl4 pre valve closed
8/9/2011	10:08:59 AM	SiCl4 post valve closed
8/9/2011	10:08:59 AM	Bypass valve closed
8/9/2011	10:08:59 AM	Bubbler valve closed
8/9/2011	10:08:59 AM	Helium valve opened
8/9/2011	10:08:59 AM	Main Vac valve opened
8/9/2011	10:08:59 AM	Helium MFC set to  20.000000
8/9/2011	10:08:59 AM	H2 MFC set to  0.000000
8/9/2011	10:08:59 AM	BCl3 MFC set to  0.000000
8/9/2011	10:08:59 AM	PHl3 MFC set to  0.000000
8/9/2011	10:08:59 AM	SiCl4 MFC set to  0.000000
8/9/2011	10:08:59 AM	Bypass solenoid MFC set to  0.000000
8/9/2011	10:08:59 AM	Tube furnace set to 100
8/9/2011	10:09:29 AM	Helium valve closed
8/9/2011	10:09:29 AM	H2 valve closed
8/9/2011	10:09:29 AM	BCl3 valve closed
8/9/2011	10:09:29 AM	PH3 valve closed
8/9/2011	10:09:29 AM	SiCl4 pre valve closed
8/9/2011	10:09:29 AM	SiCl4 post valve closed
8/9/2011	10:09:29 AM	Bypass valve closed
8/9/2011	10:09:29 AM	Bubbler valve closed
8/9/2011	10:09:29 AM	Main Vac valve opened
8/9/2011	10:09:29 AM	Helium MFC set to  0.000000
8/9/2011	10:09:29 AM	H2 MFC set to  0.000000
8/9/2011	10:09:29 AM	BCl3 MFC set to  0.000000
8/9/2011	10:09:29 AM	PHl3 MFC set to  0.000000
8/9/2011	10:09:29 AM	SiCl4 MFC set to  0.000000
8/9/2011	10:09:29 AM	Bypass solenoid MFC set to  0.000000
8/9/2011	10:09:29 AM	Tube furnace set to 100
8/9/2011	10:09:59 AM	H2 valve closed
8/9/2011	10:09:59 AM	BCl3 valve closed
8/9/2011	10:09:59 AM	PH3 valve closed
8/9/2011	10:09:59 AM	SiCl4 pre valve closed
8/9/2011	10:09:59 AM	SiCl4 post valve closed
8/9/2011	10:09:59 AM	Bypass valve closed
8/9/2011	10:09:59 AM	Bubbler valve closed
8/9/2011	10:09:59 AM	Helium valve opened
8/9/2011	10:09:59 AM	Main Vac valve opened
8/9/2011	10:09:59 AM	Helium MFC set to  20.000000
8/9/2011	10:09:59 AM	H2 MFC set to  0.000000
8/9/2011	10:09:59 AM	BCl3 MFC set to  0.000000
8/9/2011	10:09:59 AM	PHl3 MFC set to  0.000000
8/9/2011	10:09:59 AM	SiCl4 MFC set to  0.000000
8/9/2011	10:09:59 AM	Bypass solenoid MFC set to  0.000000
8/9/2011	10:09:59 AM	Tube furnace set to 100
8/9/2011	10:10:29 AM	Helium valve closed
8/9/2011	10:10:29 AM	H2 valve closed
8/9/2011	10:10:29 AM	BCl3 valve closed
8/9/2011	10:10:29 AM	PH3 valve closed
8/9/2011	10:10:29 AM	SiCl4 pre valve closed
8/9/2011	10:10:29 AM	SiCl4 post valve closed
8/9/2011	10:10:29 AM	Bypass valve closed
8/9/2011	10:10:29 AM	Bubbler valve closed
8/9/2011	10:10:29 AM	Main Vac valve opened
8/9/2011	10:10:29 AM	Helium MFC set to  0.000000
8/9/2011	10:10:29 AM	H2 MFC set to  0.000000
8/9/2011	10:10:29 AM	BCl3 MFC set to  0.000000
8/9/2011	10:10:29 AM	PHl3 MFC set to  0.000000
8/9/2011	10:10:29 AM	SiCl4 MFC set to  0.000000
8/9/2011	10:10:29 AM	Bypass solenoid MFC set to  0.000000
8/9/2011	10:10:29 AM	Tube furnace set to 100
8/9/2011	10:10:59 AM	H2 valve closed
8/9/2011	10:10:59 AM	BCl3 valve closed
8/9/2011	10:10:59 AM	PH3 valve closed
8/9/2011	10:10:59 AM	SiCl4 pre valve closed
8/9/2011	10:10:59 AM	SiCl4 post valve closed
8/9/2011	10:10:59 AM	Bypass valve closed
8/9/2011	10:10:59 AM	Bubbler valve closed
8/9/2011	10:10:59 AM	Helium valve opened
8/9/2011	10:10:59 AM	Main Vac valve opened
8/9/2011	10:10:59 AM	Helium MFC set to  20.000000
8/9/2011	10:10:59 AM	H2 MFC set to  0.000000
8/9/2011	10:10:59 AM	BCl3 MFC set to  0.000000
8/9/2011	10:10:59 AM	PHl3 MFC set to  0.000000
8/9/2011	10:10:59 AM	SiCl4 MFC set to  0.000000
8/9/2011	10:10:59 AM	Bypass solenoid MFC set to  0.000000
8/9/2011	10:11:00 AM	Tube furnace set to 100
8/9/2011	10:11:30 AM	Helium valve closed
8/9/2011	10:11:30 AM	H2 valve closed
8/9/2011	10:11:30 AM	BCl3 valve closed
8/9/2011	10:11:30 AM	PH3 valve closed
8/9/2011	10:11:30 AM	SiCl4 pre valve closed
8/9/2011	10:11:30 AM	SiCl4 post valve closed
8/9/2011	10:11:30 AM	Bypass valve closed
8/9/2011	10:11:30 AM	Bubbler valve closed
8/9/2011	10:11:30 AM	Main Vac valve opened
8/9/2011	10:11:30 AM	Helium MFC set to  0.000000
8/9/2011	10:11:30 AM	H2 MFC set to  0.000000
8/9/2011	10:11:30 AM	BCl3 MFC set to  0.000000
8/9/2011	10:11:30 AM	PHl3 MFC set to  0.000000
8/9/2011	10:11:30 AM	SiCl4 MFC set to  0.000000
8/9/2011	10:11:30 AM	Bypass solenoid MFC set to  0.000000
8/9/2011	10:11:30 AM	Tube furnace set to 100
8/9/2011	10:11:52 AM	Run aborted at 10:11 AM
8/9/2011	10:11:52 AM	Helium valve closed
8/9/2011	10:11:52 AM	H2 valve closed
8/9/2011	10:11:52 AM	BCl3 valve closed
8/9/2011	10:11:52 AM	PH3 valve closed
8/9/2011	10:11:52 AM	SiCl4 pre valve closed
8/9/2011	10:11:52 AM	SiCl4 post valve closed
8/9/2011	10:11:52 AM	Bypass valve closed
8/9/2011	10:11:52 AM	Main Vac valve closed
8/9/2011	10:11:52 AM	Bubbler valve closed
8/9/2011	10:11:52 AM	Helium MFC set to  0.000000
8/9/2011	10:11:52 AM	H2 MFC set to  0.000000
8/9/2011	10:11:52 AM	BCl3 MFC set to  0.000000
8/9/2011	10:11:52 AM	PHl3 MFC set to  0.000000
8/9/2011	10:11:52 AM	SiCl4 MFC set to  0.000000
8/9/2011	10:11:52 AM	Tube furnace set to 0
8/9/2011	10:12:21 AM	Main Vac valve opened
8/9/2011	10:12:59 AM	Recipe started at 10:12 AM
8/9/2011	10:12:59 AM	Helium valve closed
8/9/2011	10:12:59 AM	H2 valve closed
8/9/2011	10:12:59 AM	BCl3 valve closed
8/9/2011	10:12:59 AM	PH3 valve closed
8/9/2011	10:12:59 AM	SiCl4 pre valve closed
8/9/2011	10:12:59 AM	SiCl4 post valve closed
8/9/2011	10:12:59 AM	Bypass valve closed
8/9/2011	10:12:59 AM	Bubbler valve closed
8/9/2011	10:12:59 AM	Main Vac valve opened
8/9/2011	10:12:59 AM	Helium MFC set to  0.000000
8/9/2011	10:12:59 AM	H2 MFC set to  0.000000
8/9/2011	10:12:59 AM	BCl3 MFC set to  0.000000
8/9/2011	10:12:59 AM	PHl3 MFC set to  0.000000
8/9/2011	10:12:59 AM	SiCl4 MFC set to  0.000000
8/9/2011	10:12:59 AM	Bypass solenoid MFC set to  0.000000
8/9/2011	10:12:59 AM	Tube furnace set to 100
8/9/2011	10:13:29 AM	H2 valve closed
8/9/2011	10:13:29 AM	BCl3 valve closed
8/9/2011	10:13:29 AM	PH3 valve closed
8/9/2011	10:13:29 AM	SiCl4 pre valve closed
8/9/2011	10:13:29 AM	SiCl4 post valve closed
8/9/2011	10:13:29 AM	Bypass valve closed
8/9/2011	10:13:29 AM	Bubbler valve closed
8/9/2011	10:13:29 AM	Helium valve opened
8/9/2011	10:13:29 AM	Main Vac valve opened
8/9/2011	10:13:29 AM	Helium MFC set to  20.000000
8/9/2011	10:13:29 AM	H2 MFC set to  0.000000
8/9/2011	10:13:29 AM	BCl3 MFC set to  0.000000
8/9/2011	10:13:29 AM	PHl3 MFC set to  0.000000
8/9/2011	10:13:29 AM	SiCl4 MFC set to  0.000000
8/9/2011	10:13:29 AM	Bypass solenoid MFC set to  0.000000
8/9/2011	10:13:29 AM	Tube furnace set to 100
8/9/2011	10:13:59 AM	Helium valve closed
8/9/2011	10:13:59 AM	H2 valve closed
8/9/2011	10:13:59 AM	BCl3 valve closed
8/9/2011	10:13:59 AM	PH3 valve closed
8/9/2011	10:13:59 AM	SiCl4 pre valve closed
8/9/2011	10:13:59 AM	SiCl4 post valve closed
8/9/2011	10:13:59 AM	Bypass valve closed
8/9/2011	10:13:59 AM	Bubbler valve closed
8/9/2011	10:13:59 AM	Main Vac valve opened
8/9/2011	10:13:59 AM	Helium MFC set to  0.000000
8/9/2011	10:13:59 AM	H2 MFC set to  0.000000
8/9/2011	10:13:59 AM	BCl3 MFC set to  0.000000
8/9/2011	10:13:59 AM	PHl3 MFC set to  0.000000
8/9/2011	10:13:59 AM	SiCl4 MFC set to  0.000000
8/9/2011	10:13:59 AM	Bypass solenoid MFC set to  0.000000
8/9/2011	10:13:59 AM	Tube furnace set to 100
8/9/2011	10:14:29 AM	H2 valve closed
8/9/2011	10:14:29 AM	BCl3 valve closed
8/9/2011	10:14:29 AM	PH3 valve closed
8/9/2011	10:14:29 AM	SiCl4 pre valve closed
8/9/2011	10:14:29 AM	SiCl4 post valve closed
8/9/2011	10:14:29 AM	Bypass valve closed
8/9/2011	10:14:29 AM	Bubbler valve closed
8/9/2011	10:14:29 AM	Helium valve opened
8/9/2011	10:14:29 AM	Main Vac valve opened
8/9/2011	10:14:29 AM	Helium MFC set to  20.000000
8/9/2011	10:14:29 AM	H2 MFC set to  0.000000
8/9/2011	10:14:29 AM	BCl3 MFC set to  0.000000
8/9/2011	10:14:29 AM	PHl3 MFC set to  0.000000
8/9/2011	10:14:29 AM	SiCl4 MFC set to  0.000000
8/9/2011	10:14:29 AM	Bypass solenoid MFC set to  0.000000
8/9/2011	10:14:29 AM	Tube furnace set to 100
8/9/2011	10:15:00 AM	Helium valve closed
8/9/2011	10:15:00 AM	H2 valve closed
8/9/2011	10:15:00 AM	BCl3 valve closed
8/9/2011	10:15:00 AM	PH3 valve closed
8/9/2011	10:15:00 AM	SiCl4 pre valve closed
8/9/2011	10:15:00 AM	SiCl4 post valve closed
8/9/2011	10:15:00 AM	Bypass valve closed
8/9/2011	10:15:00 AM	Bubbler valve closed
8/9/2011	10:15:00 AM	Main Vac valve opened
8/9/2011	10:15:00 AM	Helium MFC set to  0.000000
8/9/2011	10:15:00 AM	H2 MFC set to  0.000000
8/9/2011	10:15:00 AM	BCl3 MFC set to  0.000000
8/9/2011	10:15:00 AM	PHl3 MFC set to  0.000000
8/9/2011	10:15:00 AM	SiCl4 MFC set to  0.000000
8/9/2011	10:15:00 AM	Bypass solenoid MFC set to  0.000000
8/9/2011	10:15:00 AM	Tube furnace set to 100
8/9/2011	10:15:30 AM	H2 valve closed
8/9/2011	10:15:30 AM	BCl3 valve closed
8/9/2011	10:15:30 AM	PH3 valve closed
8/9/2011	10:15:30 AM	SiCl4 pre valve closed
8/9/2011	10:15:30 AM	SiCl4 post valve closed
8/9/2011	10:15:30 AM	Bypass valve closed
8/9/2011	10:15:30 AM	Bubbler valve closed
8/9/2011	10:15:30 AM	Helium valve opened
8/9/2011	10:15:30 AM	Main Vac valve opened
8/9/2011	10:15:30 AM	Helium MFC set to  20.000000
8/9/2011	10:15:30 AM	H2 MFC set to  0.000000
8/9/2011	10:15:30 AM	BCl3 MFC set to  0.000000
8/9/2011	10:15:30 AM	PHl3 MFC set to  0.000000
8/9/2011	10:15:30 AM	SiCl4 MFC set to  0.000000
8/9/2011	10:15:30 AM	Bypass solenoid MFC set to  0.000000
8/9/2011	10:15:30 AM	Tube furnace set to 100
8/9/2011	10:16:00 AM	Helium valve closed
8/9/2011	10:16:00 AM	H2 valve closed
8/9/2011	10:16:00 AM	BCl3 valve closed
8/9/2011	10:16:00 AM	PH3 valve closed
8/9/2011	10:16:00 AM	SiCl4 pre valve closed
8/9/2011	10:16:00 AM	SiCl4 post valve closed
8/9/2011	10:16:00 AM	Bypass valve closed
8/9/2011	10:16:00 AM	Bubbler valve closed
8/9/2011	10:16:00 AM	Main Vac valve opened
8/9/2011	10:16:00 AM	Helium MFC set to  0.000000
8/9/2011	10:16:00 AM	H2 MFC set to  0.000000
8/9/2011	10:16:00 AM	BCl3 MFC set to  0.000000
8/9/2011	10:16:00 AM	PHl3 MFC set to  0.000000
8/9/2011	10:16:00 AM	SiCl4 MFC set to  0.000000
8/9/2011	10:16:00 AM	Bypass solenoid MFC set to  0.000000
8/9/2011	10:16:00 AM	Tube furnace set to 100
8/9/2011	10:16:30 AM	H2 valve closed
8/9/2011	10:16:30 AM	BCl3 valve closed
8/9/2011	10:16:30 AM	PH3 valve closed
8/9/2011	10:16:30 AM	SiCl4 pre valve closed
8/9/2011	10:16:30 AM	SiCl4 post valve closed
8/9/2011	10:16:30 AM	Bypass valve closed
8/9/2011	10:16:30 AM	Bubbler valve closed
8/9/2011	10:16:30 AM	Helium valve opened
8/9/2011	10:16:30 AM	Main Vac valve opened
8/9/2011	10:16:30 AM	Helium MFC set to  20.000000
8/9/2011	10:16:30 AM	H2 MFC set to  0.000000
8/9/2011	10:16:30 AM	BCl3 MFC set to  0.000000
8/9/2011	10:16:30 AM	PHl3 MFC set to  0.000000
8/9/2011	10:16:30 AM	SiCl4 MFC set to  0.000000
8/9/2011	10:16:30 AM	Bypass solenoid MFC set to  0.000000
8/9/2011	10:16:30 AM	Tube furnace set to 100
8/9/2011	10:17:00 AM	Helium valve closed
8/9/2011	10:17:00 AM	H2 valve closed
8/9/2011	10:17:00 AM	BCl3 valve closed
8/9/2011	10:17:00 AM	PH3 valve closed
8/9/2011	10:17:00 AM	SiCl4 pre valve closed
8/9/2011	10:17:00 AM	SiCl4 post valve closed
8/9/2011	10:17:00 AM	Bypass valve closed
8/9/2011	10:17:00 AM	Bubbler valve closed
8/9/2011	10:17:00 AM	Main Vac valve opened
8/9/2011	10:17:00 AM	Helium MFC set to  0.000000
8/9/2011	10:17:00 AM	H2 MFC set to  0.000000
8/9/2011	10:17:00 AM	BCl3 MFC set to  0.000000
8/9/2011	10:17:00 AM	PHl3 MFC set to  0.000000
8/9/2011	10:17:00 AM	SiCl4 MFC set to  0.000000
8/9/2011	10:17:00 AM	Bypass solenoid MFC set to  0.000000
8/9/2011	10:17:00 AM	Tube furnace set to 100
8/9/2011	10:17:31 AM	H2 valve closed
8/9/2011	10:17:31 AM	BCl3 valve closed
8/9/2011	10:17:31 AM	PH3 valve closed
8/9/2011	10:17:31 AM	SiCl4 pre valve closed
8/9/2011	10:17:31 AM	SiCl4 post valve closed
8/9/2011	10:17:31 AM	Bypass valve closed
8/9/2011	10:17:31 AM	Bubbler valve closed
8/9/2011	10:17:31 AM	Helium valve opened
8/9/2011	10:17:31 AM	Main Vac valve opened
8/9/2011	10:17:31 AM	Helium MFC set to  20.000000
8/9/2011	10:17:31 AM	H2 MFC set to  0.000000
8/9/2011	10:17:31 AM	BCl3 MFC set to  0.000000
8/9/2011	10:17:31 AM	PHl3 MFC set to  0.000000
8/9/2011	10:17:31 AM	SiCl4 MFC set to  0.000000
8/9/2011	10:17:31 AM	Bypass solenoid MFC set to  0.000000
8/9/2011	10:17:31 AM	Tube furnace set to 100
8/9/2011	10:18:01 AM	Helium valve closed
8/9/2011	10:18:01 AM	H2 valve closed
8/9/2011	10:18:01 AM	BCl3 valve closed
8/9/2011	10:18:01 AM	PH3 valve closed
8/9/2011	10:18:01 AM	SiCl4 pre valve closed
8/9/2011	10:18:01 AM	SiCl4 post valve closed
8/9/2011	10:18:01 AM	Bypass valve closed
8/9/2011	10:18:01 AM	Bubbler valve closed
8/9/2011	10:18:01 AM	Main Vac valve opened
8/9/2011	10:18:01 AM	Helium MFC set to  0.000000
8/9/2011	10:18:01 AM	H2 MFC set to  0.000000
8/9/2011	10:18:01 AM	BCl3 MFC set to  0.000000
8/9/2011	10:18:01 AM	PHl3 MFC set to  0.000000
8/9/2011	10:18:01 AM	SiCl4 MFC set to  0.000000
8/9/2011	10:18:01 AM	Bypass solenoid MFC set to  0.000000
8/9/2011	10:18:01 AM	Tube furnace set to 100
8/9/2011	10:18:31 AM	H2 valve closed
8/9/2011	10:18:31 AM	BCl3 valve closed
8/9/2011	10:18:31 AM	PH3 valve closed
8/9/2011	10:18:31 AM	SiCl4 pre valve closed
8/9/2011	10:18:31 AM	SiCl4 post valve closed
8/9/2011	10:18:31 AM	Bypass valve closed
8/9/2011	10:18:31 AM	Bubbler valve closed
8/9/2011	10:18:31 AM	Helium valve opened
8/9/2011	10:18:31 AM	Main Vac valve opened
8/9/2011	10:18:31 AM	Helium MFC set to  20.000000
8/9/2011	10:18:31 AM	H2 MFC set to  0.000000
8/9/2011	10:18:31 AM	BCl3 MFC set to  0.000000
8/9/2011	10:18:31 AM	PHl3 MFC set to  0.000000
8/9/2011	10:18:31 AM	SiCl4 MFC set to  0.000000
8/9/2011	10:18:31 AM	Bypass solenoid MFC set to  0.000000
8/9/2011	10:18:31 AM	Tube furnace set to 100
8/9/2011	10:19:01 AM	Helium valve closed
8/9/2011	10:19:01 AM	H2 valve closed
8/9/2011	10:19:01 AM	BCl3 valve closed
8/9/2011	10:19:01 AM	PH3 valve closed
8/9/2011	10:19:01 AM	SiCl4 pre valve closed
8/9/2011	10:19:01 AM	SiCl4 post valve closed
8/9/2011	10:19:01 AM	Bypass valve closed
8/9/2011	10:19:01 AM	Bubbler valve closed
8/9/2011	10:19:01 AM	Main Vac valve opened
8/9/2011	10:19:01 AM	Helium MFC set to  0.000000
8/9/2011	10:19:01 AM	H2 MFC set to  0.000000
8/9/2011	10:19:01 AM	BCl3 MFC set to  0.000000
8/9/2011	10:19:01 AM	PHl3 MFC set to  0.000000
8/9/2011	10:19:01 AM	SiCl4 MFC set to  0.000000
8/9/2011	10:19:01 AM	Bypass solenoid MFC set to  0.000000
8/9/2011	10:19:01 AM	Tube furnace set to 100
8/9/2011	10:19:31 AM	H2 valve closed
8/9/2011	10:19:31 AM	BCl3 valve closed
8/9/2011	10:19:31 AM	PH3 valve closed
8/9/2011	10:19:31 AM	SiCl4 pre valve closed
8/9/2011	10:19:31 AM	SiCl4 post valve closed
8/9/2011	10:19:31 AM	Bypass valve closed
8/9/2011	10:19:31 AM	Bubbler valve closed
8/9/2011	10:19:31 AM	Helium valve opened
8/9/2011	10:19:31 AM	Main Vac valve opened
8/9/2011	10:19:31 AM	Helium MFC set to  20.000000
8/9/2011	10:19:31 AM	H2 MFC set to  0.000000
8/9/2011	10:19:31 AM	BCl3 MFC set to  0.000000
8/9/2011	10:19:31 AM	PHl3 MFC set to  0.000000
8/9/2011	10:19:31 AM	SiCl4 MFC set to  0.000000
8/9/2011	10:19:31 AM	Bypass solenoid MFC set to  0.000000
8/9/2011	10:19:31 AM	Tube furnace set to 100
8/9/2011	10:20:01 AM	Helium valve closed
8/9/2011	10:20:01 AM	H2 valve closed
8/9/2011	10:20:01 AM	BCl3 valve closed
8/9/2011	10:20:02 AM	PH3 valve closed
8/9/2011	10:20:02 AM	SiCl4 pre valve closed
8/9/2011	10:20:02 AM	SiCl4 post valve closed
8/9/2011	10:20:02 AM	Bypass valve closed
8/9/2011	10:20:02 AM	Bubbler valve closed
8/9/2011	10:20:02 AM	Main Vac valve opened
8/9/2011	10:20:02 AM	Helium MFC set to  0.000000
8/9/2011	10:20:02 AM	H2 MFC set to  0.000000
8/9/2011	10:20:02 AM	BCl3 MFC set to  0.000000
8/9/2011	10:20:02 AM	PHl3 MFC set to  0.000000
8/9/2011	10:20:02 AM	SiCl4 MFC set to  0.000000
8/9/2011	10:20:02 AM	Bypass solenoid MFC set to  0.000000
8/9/2011	10:20:02 AM	Tube furnace set to 100
8/9/2011	10:20:32 AM	H2 valve closed
8/9/2011	10:20:32 AM	BCl3 valve closed
8/9/2011	10:20:32 AM	PH3 valve closed
8/9/2011	10:20:32 AM	SiCl4 pre valve closed
8/9/2011	10:20:32 AM	SiCl4 post valve closed
8/9/2011	10:20:32 AM	Bypass valve closed
8/9/2011	10:20:32 AM	Bubbler valve closed
8/9/2011	10:20:32 AM	Helium valve opened
8/9/2011	10:20:32 AM	Main Vac valve opened
8/9/2011	10:20:32 AM	Helium MFC set to  20.000000
8/9/2011	10:20:32 AM	H2 MFC set to  0.000000
8/9/2011	10:20:32 AM	BCl3 MFC set to  0.000000
8/9/2011	10:20:32 AM	PHl3 MFC set to  0.000000
8/9/2011	10:20:32 AM	SiCl4 MFC set to  0.000000
8/9/2011	10:20:32 AM	Bypass solenoid MFC set to  0.000000
8/9/2011	10:20:32 AM	Tube furnace set to 100
8/9/2011	10:21:02 AM	Helium valve closed
8/9/2011	10:21:02 AM	H2 valve closed
8/9/2011	10:21:02 AM	BCl3 valve closed
8/9/2011	10:21:02 AM	PH3 valve closed
8/9/2011	10:21:02 AM	SiCl4 pre valve closed
8/9/2011	10:21:02 AM	SiCl4 post valve closed
8/9/2011	10:21:02 AM	Bypass valve closed
8/9/2011	10:21:02 AM	Bubbler valve closed
8/9/2011	10:21:02 AM	Main Vac valve opened
8/9/2011	10:21:02 AM	Helium MFC set to  0.000000
8/9/2011	10:21:02 AM	H2 MFC set to  0.000000
8/9/2011	10:21:02 AM	BCl3 MFC set to  0.000000
8/9/2011	10:21:02 AM	PHl3 MFC set to  0.000000
8/9/2011	10:21:02 AM	SiCl4 MFC set to  0.000000
8/9/2011	10:21:02 AM	Bypass solenoid MFC set to  0.000000
8/9/2011	10:21:02 AM	Tube furnace set to 100
8/9/2011	10:21:32 AM	H2 valve closed
8/9/2011	10:21:32 AM	BCl3 valve closed
8/9/2011	10:21:32 AM	PH3 valve closed
8/9/2011	10:21:32 AM	SiCl4 pre valve closed
8/9/2011	10:21:32 AM	SiCl4 post valve closed
8/9/2011	10:21:32 AM	Bypass valve closed
8/9/2011	10:21:32 AM	Bubbler valve closed
8/9/2011	10:21:32 AM	Helium valve opened
8/9/2011	10:21:32 AM	Main Vac valve opened
8/9/2011	10:21:32 AM	Helium MFC set to  20.000000
8/9/2011	10:21:32 AM	H2 MFC set to  0.000000
8/9/2011	10:21:32 AM	BCl3 MFC set to  0.000000
8/9/2011	10:21:32 AM	PHl3 MFC set to  0.000000
8/9/2011	10:21:32 AM	SiCl4 MFC set to  0.000000
8/9/2011	10:21:32 AM	Bypass solenoid MFC set to  0.000000
8/9/2011	10:21:32 AM	Tube furnace set to 100
8/9/2011	10:22:02 AM	Helium valve closed
8/9/2011	10:22:02 AM	H2 valve closed
8/9/2011	10:22:02 AM	BCl3 valve closed
8/9/2011	10:22:02 AM	PH3 valve closed
8/9/2011	10:22:02 AM	SiCl4 pre valve closed
8/9/2011	10:22:02 AM	SiCl4 post valve closed
8/9/2011	10:22:02 AM	Bypass valve closed
8/9/2011	10:22:02 AM	Bubbler valve closed
8/9/2011	10:22:02 AM	Main Vac valve opened
8/9/2011	10:22:02 AM	Helium MFC set to  0.000000
8/9/2011	10:22:02 AM	H2 MFC set to  0.000000
8/9/2011	10:22:02 AM	BCl3 MFC set to  0.000000
8/9/2011	10:22:02 AM	PHl3 MFC set to  0.000000
8/9/2011	10:22:02 AM	SiCl4 MFC set to  0.000000
8/9/2011	10:22:02 AM	Bypass solenoid MFC set to  0.000000
8/9/2011	10:22:02 AM	Tube furnace set to 100
8/9/2011	10:22:32 AM	H2 valve closed
8/9/2011	10:22:32 AM	BCl3 valve closed
8/9/2011	10:22:32 AM	PH3 valve closed
8/9/2011	10:22:32 AM	SiCl4 pre valve closed
8/9/2011	10:22:32 AM	SiCl4 post valve closed
8/9/2011	10:22:32 AM	Bypass valve closed
8/9/2011	10:22:32 AM	Bubbler valve closed
8/9/2011	10:22:32 AM	Helium valve opened
8/9/2011	10:22:32 AM	Main Vac valve opened
8/9/2011	10:22:33 AM	Helium MFC set to  20.000000
8/9/2011	10:22:33 AM	H2 MFC set to  0.000000
8/9/2011	10:22:33 AM	BCl3 MFC set to  0.000000
8/9/2011	10:22:33 AM	PHl3 MFC set to  0.000000
8/9/2011	10:22:33 AM	SiCl4 MFC set to  0.000000
8/9/2011	10:22:33 AM	Bypass solenoid MFC set to  0.000000
8/9/2011	10:22:33 AM	Tube furnace set to 100
8/9/2011	10:23:03 AM	Helium valve closed
8/9/2011	10:23:03 AM	H2 valve closed
8/9/2011	10:23:03 AM	BCl3 valve closed
8/9/2011	10:23:03 AM	PH3 valve closed
8/9/2011	10:23:03 AM	SiCl4 pre valve closed
8/9/2011	10:23:03 AM	SiCl4 post valve closed
8/9/2011	10:23:03 AM	Bypass valve closed
8/9/2011	10:23:03 AM	Bubbler valve closed
8/9/2011	10:23:03 AM	Main Vac valve opened
8/9/2011	10:23:03 AM	Helium MFC set to  0.000000
8/9/2011	10:23:03 AM	H2 MFC set to  0.000000
8/9/2011	10:23:03 AM	BCl3 MFC set to  0.000000
8/9/2011	10:23:03 AM	PHl3 MFC set to  0.000000
8/9/2011	10:23:03 AM	SiCl4 MFC set to  0.000000
8/9/2011	10:23:03 AM	Bypass solenoid MFC set to  0.000000
8/9/2011	10:23:03 AM	Tube furnace set to 100
8/9/2011	10:23:04 AM	Run finished at 10:23 AM
8/9/2011	10:25:05 AM	Main Vac valve closed
8/9/2011	10:25:13 AM	Main Vac valve opened
8/9/2011	10:26:11 AM	Recipe started at 10:26 AM
8/9/2011	10:26:11 AM	Helium valve closed
8/9/2011	10:26:12 AM	H2 valve closed
8/9/2011	10:26:12 AM	BCl3 valve closed
8/9/2011	10:26:12 AM	PH3 valve closed
8/9/2011	10:26:12 AM	SiCl4 pre valve closed
8/9/2011	10:26:12 AM	SiCl4 post valve closed
8/9/2011	10:26:12 AM	Main Vac valve closed
8/9/2011	10:26:12 AM	Bypass valve closed
8/9/2011	10:26:12 AM	Bubbler valve closed
8/9/2011	10:26:12 AM	Helium MFC set to  0.000000
8/9/2011	10:26:12 AM	H2 MFC set to  0.000000
8/9/2011	10:26:12 AM	BCl3 MFC set to  0.000000
8/9/2011	10:26:12 AM	PHl3 MFC set to  0.000000
8/9/2011	10:26:12 AM	SiCl4 MFC set to  0.000000
8/9/2011	10:26:12 AM	Bypass solenoid MFC set to  0.000000
8/9/2011	10:26:12 AM	Tube furnace set to 0
8/9/2011	10:26:15 AM	Helium valve closed
8/9/2011	10:26:15 AM	BCl3 valve closed
8/9/2011	10:26:15 AM	PH3 valve closed
8/9/2011	10:26:15 AM	SiCl4 pre valve closed
8/9/2011	10:26:15 AM	SiCl4 post valve closed
8/9/2011	10:26:15 AM	Main Vac valve closed
8/9/2011	10:26:15 AM	Bypass valve closed
8/9/2011	10:26:15 AM	Bubbler valve closed
8/9/2011	10:26:15 AM	H2 valve opened
8/9/2011	10:26:15 AM	Helium MFC set to  0.000000
8/9/2011	10:26:15 AM	H2 MFC set to  500.000000
8/9/2011	10:26:15 AM	BCl3 MFC set to  0.000000
8/9/2011	10:26:15 AM	PHl3 MFC set to  0.000000
8/9/2011	10:26:15 AM	SiCl4 MFC set to  0.000000
8/9/2011	10:26:15 AM	Bypass solenoid MFC set to  0.000000
8/9/2011	10:26:15 AM	Tube furnace set to 0
8/9/2011	10:27:19 AM	Helium valve closed
8/9/2011	10:27:19 AM	BCl3 valve closed
8/9/2011	10:27:19 AM	PH3 valve closed
8/9/2011	10:27:19 AM	SiCl4 pre valve closed
8/9/2011	10:27:19 AM	SiCl4 post valve closed
8/9/2011	10:27:19 AM	Main Vac valve closed
8/9/2011	10:27:19 AM	Bypass valve closed
8/9/2011	10:27:19 AM	H2 valve opened
8/9/2011	10:27:19 AM	Bubbler valve opened
8/9/2011	10:27:19 AM	Helium MFC set to  0.000000
8/9/2011	10:27:19 AM	H2 MFC set to  500.000000
8/9/2011	10:27:19 AM	BCl3 MFC set to  0.000000
8/9/2011	10:27:19 AM	PHl3 MFC set to  0.000000
8/9/2011	10:27:19 AM	SiCl4 MFC set to  0.000000
8/9/2011	10:27:19 AM	Bypass solenoid MFC set to  0.000000
8/9/2011	10:27:20 AM	Tube furnace set to 0
8/9/2011	10:27:21 AM	Helium valve closed
8/9/2011	10:27:21 AM	BCl3 valve closed
8/9/2011	10:27:21 AM	PH3 valve closed
8/9/2011	10:27:21 AM	SiCl4 pre valve closed
8/9/2011	10:27:21 AM	SiCl4 post valve closed
8/9/2011	10:27:21 AM	Main Vac valve closed
8/9/2011	10:27:21 AM	Bypass valve closed
8/9/2011	10:27:21 AM	H2 valve opened
8/9/2011	10:27:21 AM	Bubbler valve opened
8/9/2011	10:27:21 AM	Helium MFC set to  0.000000
8/9/2011	10:27:21 AM	H2 MFC set to  500.000000
8/9/2011	10:27:21 AM	BCl3 MFC set to  0.000000
8/9/2011	10:27:21 AM	PHl3 MFC set to  0.000000
8/9/2011	10:27:21 AM	SiCl4 MFC set to  0.000000
8/9/2011	10:27:21 AM	Bypass solenoid MFC set to  0.000000
8/9/2011	10:27:21 AM	Tube furnace set to 1000
8/9/2011	10:47:21 AM	Helium valve closed
8/9/2011	10:47:21 AM	PH3 valve closed
8/9/2011	10:47:21 AM	Main Vac valve closed
8/9/2011	10:47:21 AM	Bypass valve closed
8/9/2011	10:47:21 AM	H2 valve opened
8/9/2011	10:47:21 AM	BCl3 valve opened
8/9/2011	10:47:21 AM	SiCl4 pre valve opened
8/9/2011	10:47:21 AM	SiCl4 post valve opened
8/9/2011	10:47:21 AM	Bubbler valve opened
8/9/2011	10:47:21 AM	Helium MFC set to  0.000000
8/9/2011	10:47:21 AM	H2 MFC set to  500.000000
8/9/2011	10:47:21 AM	BCl3 MFC set to  2.300000
8/9/2011	10:47:21 AM	PHl3 MFC set to  0.000000
8/9/2011	10:47:21 AM	SiCl4 MFC set to  50.000000
8/9/2011	10:47:21 AM	Bypass solenoid MFC set to  0.000000
8/9/2011	10:47:21 AM	Tube furnace set to 1000
8/9/2011	11:03:21 AM	Helium valve closed
8/9/2011	11:03:21 AM	BCl3 valve closed
8/9/2011	11:03:21 AM	PH3 valve closed
8/9/2011	11:03:21 AM	SiCl4 pre valve closed
8/9/2011	11:03:21 AM	SiCl4 post valve closed
8/9/2011	11:03:21 AM	Main Vac valve closed
8/9/2011	11:03:21 AM	Bypass valve closed
8/9/2011	11:03:21 AM	H2 valve opened
8/9/2011	11:03:21 AM	Bubbler valve opened
8/9/2011	11:03:21 AM	Helium MFC set to  0.000000
8/9/2011	11:03:21 AM	H2 MFC set to  500.000000
8/9/2011	11:03:21 AM	BCl3 MFC set to  0.000000
8/9/2011	11:03:21 AM	PHl3 MFC set to  0.000000
8/9/2011	11:03:21 AM	SiCl4 MFC set to  0.000000
8/9/2011	11:03:21 AM	Bypass solenoid MFC set to  0.000000
8/9/2011	11:03:21 AM	Tube furnace set to 750
8/9/2011	11:08:21 AM	H2 valve closed
8/9/2011	11:08:21 AM	BCl3 valve closed
8/9/2011	11:08:21 AM	PH3 valve closed
8/9/2011	11:08:21 AM	SiCl4 pre valve closed
8/9/2011	11:08:21 AM	SiCl4 post valve closed
8/9/2011	11:08:21 AM	Main Vac valve closed
8/9/2011	11:08:21 AM	Bypass valve closed
8/9/2011	11:08:21 AM	Helium valve opened
8/9/2011	11:08:21 AM	Bubbler valve opened
8/9/2011	11:08:21 AM	Helium MFC set to  500.000000
8/9/2011	11:08:21 AM	H2 MFC set to  0.000000
8/9/2011	11:08:21 AM	BCl3 MFC set to  0.000000
8/9/2011	11:08:21 AM	PHl3 MFC set to  0.000000
8/9/2011	11:08:21 AM	SiCl4 MFC set to  0.000000
8/9/2011	11:08:21 AM	Bypass solenoid MFC set to  0.000000
8/9/2011	11:08:21 AM	Tube furnace set to 0
8/9/2011	11:28:21 AM	Helium valve closed
8/9/2011	11:28:21 AM	H2 valve closed
8/9/2011	11:28:21 AM	BCl3 valve closed
8/9/2011	11:28:21 AM	PH3 valve closed
8/9/2011	11:28:21 AM	SiCl4 pre valve closed
8/9/2011	11:28:21 AM	SiCl4 post valve closed
8/9/2011	11:28:21 AM	Main Vac valve closed
8/9/2011	11:28:21 AM	Bypass valve closed
8/9/2011	11:28:21 AM	Bubbler valve closed
8/9/2011	11:28:21 AM	Helium MFC set to  0.000000
8/9/2011	11:28:21 AM	H2 MFC set to  0.000000
8/9/2011	11:28:21 AM	BCl3 MFC set to  0.000000
8/9/2011	11:28:21 AM	PHl3 MFC set to  0.000000
8/9/2011	11:28:21 AM	SiCl4 MFC set to  0.000000
8/9/2011	11:28:21 AM	Bypass solenoid MFC set to  0.000000
8/9/2011	11:28:21 AM	Tube furnace set to 0
8/9/2011	11:28:22 AM	Run finished at 11:28 AM
8/9/2011	11:36:06 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/9/2011	11:36:07 AM	Recipe started at 11:36 AM
8/9/2011	11:36:07 AM	Helium valve closed
8/9/2011	11:36:07 AM	H2 valve closed
8/9/2011	11:36:07 AM	BCl3 valve closed
8/9/2011	11:36:07 AM	PH3 valve closed
8/9/2011	11:36:07 AM	SiCl4 pre valve closed
8/9/2011	11:36:07 AM	SiCl4 post valve closed
8/9/2011	11:36:07 AM	Main Vac valve closed
8/9/2011	11:36:07 AM	Bypass valve closed
8/9/2011	11:36:07 AM	Bubbler valve closed
8/9/2011	11:36:07 AM	Helium MFC set to  0.000000
8/9/2011	11:36:07 AM	H2 MFC set to  0.000000
8/9/2011	11:36:07 AM	BCl3 MFC set to  0.000000
8/9/2011	11:36:07 AM	PHl3 MFC set to  0.000000
8/9/2011	11:36:07 AM	SiCl4 MFC set to  0.000000
8/9/2011	11:36:07 AM	Bypass solenoid MFC set to  0.000000
8/9/2011	11:36:08 AM	Tube furnace set to 0
8/9/2011	11:36:11 AM	H2 valve closed
8/9/2011	11:36:11 AM	BCl3 valve closed
8/9/2011	11:36:11 AM	PH3 valve closed
8/9/2011	11:36:11 AM	SiCl4 pre valve closed
8/9/2011	11:36:11 AM	SiCl4 post valve closed
8/9/2011	11:36:11 AM	Main Vac valve closed
8/9/2011	11:36:11 AM	Bypass valve closed
8/9/2011	11:36:11 AM	Bubbler valve closed
8/9/2011	11:36:11 AM	Helium valve opened
8/9/2011	11:36:11 AM	Helium MFC set to  500.000000
8/9/2011	11:36:11 AM	H2 MFC set to  0.000000
8/9/2011	11:36:11 AM	BCl3 MFC set to  0.000000
8/9/2011	11:36:11 AM	PHl3 MFC set to  0.000000
8/9/2011	11:36:11 AM	SiCl4 MFC set to  0.000000
8/9/2011	11:36:11 AM	Bypass solenoid MFC set to  0.000000
8/9/2011	11:36:11 AM	Tube furnace set to 0
8/9/2011	11:36:15 AM	Helium valve closed
8/9/2011	11:36:15 AM	H2 valve closed
8/9/2011	11:36:15 AM	BCl3 valve closed
8/9/2011	11:36:15 AM	PH3 valve closed
8/9/2011	11:36:15 AM	SiCl4 pre valve closed
8/9/2011	11:36:15 AM	SiCl4 post valve closed
8/9/2011	11:36:15 AM	Main Vac valve closed
8/9/2011	11:36:15 AM	Bypass valve closed
8/9/2011	11:36:15 AM	Bubbler valve closed
8/9/2011	11:36:15 AM	Helium MFC set to  0.000000
8/9/2011	11:36:15 AM	H2 MFC set to  0.000000
8/9/2011	11:36:15 AM	BCl3 MFC set to  0.000000
8/9/2011	11:36:15 AM	PHl3 MFC set to  0.000000
8/9/2011	11:36:15 AM	SiCl4 MFC set to  0.000000
8/9/2011	11:36:15 AM	Bypass solenoid MFC set to  0.000000
8/9/2011	11:36:15 AM	Tube furnace set to 0
8/9/2011	11:36:16 AM	Run finished at 11:36 AM
8/9/2011	11:36:16 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/9/2011	11:45:26 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/9/2011	11:45:26 AM	Recipe started at 11:45 AM
8/9/2011	11:45:26 AM	Helium valve closed
8/9/2011	11:45:26 AM	H2 valve closed
8/9/2011	11:45:26 AM	BCl3 valve closed
8/9/2011	11:45:26 AM	PH3 valve closed
8/9/2011	11:45:26 AM	SiCl4 pre valve closed
8/9/2011	11:45:26 AM	SiCl4 post valve closed
8/9/2011	11:45:26 AM	Main Vac valve closed
8/9/2011	11:45:26 AM	Bubbler valve closed
8/9/2011	11:45:26 AM	Bypass valve opened
8/9/2011	11:45:26 AM	Helium MFC set to  0.000000
8/9/2011	11:45:26 AM	H2 MFC set to  0.000000
8/9/2011	11:45:26 AM	BCl3 MFC set to  0.000000
8/9/2011	11:45:26 AM	PHl3 MFC set to  0.000000
8/9/2011	11:45:26 AM	SiCl4 MFC set to  0.000000
8/9/2011	11:45:26 AM	Bypass solenoid MFC set to  0.000000
8/9/2011	11:45:27 AM	Tube furnace set to 0
8/9/2011	11:46:40 AM	Helium valve closed
8/9/2011	11:46:40 AM	H2 valve closed
8/9/2011	11:46:40 AM	BCl3 valve closed
8/9/2011	11:46:40 AM	PH3 valve closed
8/9/2011	11:46:40 AM	SiCl4 pre valve closed
8/9/2011	11:46:40 AM	SiCl4 post valve closed
8/9/2011	11:46:40 AM	Main Vac valve closed
8/9/2011	11:46:40 AM	Bubbler valve closed
8/9/2011	11:46:40 AM	Bypass valve opened
8/9/2011	11:46:40 AM	Helium MFC set to  0.000000
8/9/2011	11:46:40 AM	H2 MFC set to  0.000000
8/9/2011	11:46:40 AM	BCl3 MFC set to  0.000000
8/9/2011	11:46:40 AM	PHl3 MFC set to  0.000000
8/9/2011	11:46:40 AM	SiCl4 MFC set to  0.000000
8/9/2011	11:46:40 AM	Bypass solenoid MFC set to  0.000000
8/9/2011	11:46:40 AM	Tube furnace set to 0
8/9/2011	11:47:40 AM	Helium valve closed
8/9/2011	11:47:40 AM	H2 valve closed
8/9/2011	11:47:40 AM	BCl3 valve closed
8/9/2011	11:47:40 AM	PH3 valve closed
8/9/2011	11:47:40 AM	SiCl4 pre valve closed
8/9/2011	11:47:40 AM	SiCl4 post valve closed
8/9/2011	11:47:40 AM	Bypass valve closed
8/9/2011	11:47:40 AM	Bubbler valve closed
8/9/2011	11:47:40 AM	Main Vac valve opened
8/9/2011	11:47:40 AM	Helium MFC set to  0.000000
8/9/2011	11:47:40 AM	H2 MFC set to  0.000000
8/9/2011	11:47:40 AM	BCl3 MFC set to  0.000000
8/9/2011	11:47:40 AM	PHl3 MFC set to  0.000000
8/9/2011	11:47:40 AM	SiCl4 MFC set to  0.000000
8/9/2011	11:47:40 AM	Bypass solenoid MFC set to  0.000000
8/9/2011	11:47:40 AM	Tube furnace set to 0
8/9/2011	11:47:41 AM	Run finished at 11:47 AM
8/9/2011	11:47:41 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/9/2011	11:49:34 AM	Recipe started at 11:49 AM
8/9/2011	11:49:34 AM	Helium valve closed
8/9/2011	11:49:34 AM	H2 valve closed
8/9/2011	11:49:34 AM	BCl3 valve closed
8/9/2011	11:49:34 AM	PH3 valve closed
8/9/2011	11:49:34 AM	SiCl4 pre valve closed
8/9/2011	11:49:34 AM	SiCl4 post valve closed
8/9/2011	11:49:34 AM	Bypass valve closed
8/9/2011	11:49:34 AM	Bubbler valve closed
8/9/2011	11:49:34 AM	Main Vac valve opened
8/9/2011	11:49:34 AM	Helium MFC set to  0.000000
8/9/2011	11:49:34 AM	H2 MFC set to  0.000000
8/9/2011	11:49:34 AM	BCl3 MFC set to  0.000000
8/9/2011	11:49:34 AM	PHl3 MFC set to  0.000000
8/9/2011	11:49:34 AM	SiCl4 MFC set to  0.000000
8/9/2011	11:49:34 AM	Bypass solenoid MFC set to  0.000000
8/9/2011	11:49:34 AM	Tube furnace set to 100
8/9/2011	11:50:04 AM	H2 valve closed
8/9/2011	11:50:04 AM	BCl3 valve closed
8/9/2011	11:50:04 AM	PH3 valve closed
8/9/2011	11:50:04 AM	SiCl4 pre valve closed
8/9/2011	11:50:04 AM	SiCl4 post valve closed
8/9/2011	11:50:04 AM	Bypass valve closed
8/9/2011	11:50:04 AM	Bubbler valve closed
8/9/2011	11:50:04 AM	Helium valve opened
8/9/2011	11:50:04 AM	Main Vac valve opened
8/9/2011	11:50:04 AM	Helium MFC set to  20.000000
8/9/2011	11:50:04 AM	H2 MFC set to  0.000000
8/9/2011	11:50:04 AM	BCl3 MFC set to  0.000000
8/9/2011	11:50:04 AM	PHl3 MFC set to  0.000000
8/9/2011	11:50:04 AM	SiCl4 MFC set to  0.000000
8/9/2011	11:50:04 AM	Bypass solenoid MFC set to  0.000000
8/9/2011	11:50:04 AM	Tube furnace set to 100
8/9/2011	11:50:34 AM	Helium valve closed
8/9/2011	11:50:34 AM	H2 valve closed
8/9/2011	11:50:34 AM	BCl3 valve closed
8/9/2011	11:50:34 AM	PH3 valve closed
8/9/2011	11:50:34 AM	SiCl4 pre valve closed
8/9/2011	11:50:34 AM	SiCl4 post valve closed
8/9/2011	11:50:34 AM	Bypass valve closed
8/9/2011	11:50:34 AM	Bubbler valve closed
8/9/2011	11:50:34 AM	Main Vac valve opened
8/9/2011	11:50:34 AM	Helium MFC set to  0.000000
8/9/2011	11:50:34 AM	H2 MFC set to  0.000000
8/9/2011	11:50:34 AM	BCl3 MFC set to  0.000000
8/9/2011	11:50:34 AM	PHl3 MFC set to  0.000000
8/9/2011	11:50:34 AM	SiCl4 MFC set to  0.000000
8/9/2011	11:50:34 AM	Bypass solenoid MFC set to  0.000000
8/9/2011	11:50:35 AM	Tube furnace set to 100
8/9/2011	11:51:05 AM	H2 valve closed
8/9/2011	11:51:05 AM	BCl3 valve closed
8/9/2011	11:51:05 AM	PH3 valve closed
8/9/2011	11:51:05 AM	SiCl4 pre valve closed
8/9/2011	11:51:05 AM	SiCl4 post valve closed
8/9/2011	11:51:05 AM	Bypass valve closed
8/9/2011	11:51:05 AM	Bubbler valve closed
8/9/2011	11:51:05 AM	Helium valve opened
8/9/2011	11:51:05 AM	Main Vac valve opened
8/9/2011	11:51:05 AM	Helium MFC set to  20.000000
8/9/2011	11:51:05 AM	H2 MFC set to  0.000000
8/9/2011	11:51:05 AM	BCl3 MFC set to  0.000000
8/9/2011	11:51:05 AM	PHl3 MFC set to  0.000000
8/9/2011	11:51:05 AM	SiCl4 MFC set to  0.000000
8/9/2011	11:51:05 AM	Bypass solenoid MFC set to  0.000000
8/9/2011	11:51:05 AM	Tube furnace set to 100
8/9/2011	11:51:35 AM	Helium valve closed
8/9/2011	11:51:35 AM	H2 valve closed
8/9/2011	11:51:35 AM	BCl3 valve closed
8/9/2011	11:51:35 AM	PH3 valve closed
8/9/2011	11:51:35 AM	SiCl4 pre valve closed
8/9/2011	11:51:35 AM	SiCl4 post valve closed
8/9/2011	11:51:35 AM	Bypass valve closed
8/9/2011	11:51:35 AM	Bubbler valve closed
8/9/2011	11:51:35 AM	Main Vac valve opened
8/9/2011	11:51:35 AM	Helium MFC set to  0.000000
8/9/2011	11:51:35 AM	H2 MFC set to  0.000000
8/9/2011	11:51:35 AM	BCl3 MFC set to  0.000000
8/9/2011	11:51:35 AM	PHl3 MFC set to  0.000000
8/9/2011	11:51:35 AM	SiCl4 MFC set to  0.000000
8/9/2011	11:51:35 AM	Bypass solenoid MFC set to  0.000000
8/9/2011	11:51:35 AM	Tube furnace set to 100
8/9/2011	11:52:05 AM	H2 valve closed
8/9/2011	11:52:05 AM	BCl3 valve closed
8/9/2011	11:52:05 AM	PH3 valve closed
8/9/2011	11:52:05 AM	SiCl4 pre valve closed
8/9/2011	11:52:05 AM	SiCl4 post valve closed
8/9/2011	11:52:05 AM	Bypass valve closed
8/9/2011	11:52:05 AM	Bubbler valve closed
8/9/2011	11:52:05 AM	Helium valve opened
8/9/2011	11:52:05 AM	Main Vac valve opened
8/9/2011	11:52:05 AM	Helium MFC set to  20.000000
8/9/2011	11:52:05 AM	H2 MFC set to  0.000000
8/9/2011	11:52:05 AM	BCl3 MFC set to  0.000000
8/9/2011	11:52:05 AM	PHl3 MFC set to  0.000000
8/9/2011	11:52:05 AM	SiCl4 MFC set to  0.000000
8/9/2011	11:52:05 AM	Bypass solenoid MFC set to  0.000000
8/9/2011	11:52:05 AM	Tube furnace set to 100
8/9/2011	11:52:35 AM	Helium valve closed
8/9/2011	11:52:35 AM	H2 valve closed
8/9/2011	11:52:35 AM	BCl3 valve closed
8/9/2011	11:52:35 AM	PH3 valve closed
8/9/2011	11:52:35 AM	SiCl4 pre valve closed
8/9/2011	11:52:35 AM	SiCl4 post valve closed
8/9/2011	11:52:35 AM	Bypass valve closed
8/9/2011	11:52:35 AM	Bubbler valve closed
8/9/2011	11:52:35 AM	Main Vac valve opened
8/9/2011	11:52:35 AM	Helium MFC set to  0.000000
8/9/2011	11:52:35 AM	H2 MFC set to  0.000000
8/9/2011	11:52:35 AM	BCl3 MFC set to  0.000000
8/9/2011	11:52:35 AM	PHl3 MFC set to  0.000000
8/9/2011	11:52:35 AM	SiCl4 MFC set to  0.000000
8/9/2011	11:52:35 AM	Bypass solenoid MFC set to  0.000000
8/9/2011	11:52:35 AM	Tube furnace set to 100
8/9/2011	11:53:05 AM	H2 valve closed
8/9/2011	11:53:05 AM	BCl3 valve closed
8/9/2011	11:53:05 AM	PH3 valve closed
8/9/2011	11:53:05 AM	SiCl4 pre valve closed
8/9/2011	11:53:05 AM	SiCl4 post valve closed
8/9/2011	11:53:05 AM	Bypass valve closed
8/9/2011	11:53:05 AM	Bubbler valve closed
8/9/2011	11:53:05 AM	Helium valve opened
8/9/2011	11:53:05 AM	Main Vac valve opened
8/9/2011	11:53:05 AM	Helium MFC set to  20.000000
8/9/2011	11:53:05 AM	H2 MFC set to  0.000000
8/9/2011	11:53:05 AM	BCl3 MFC set to  0.000000
8/9/2011	11:53:05 AM	PHl3 MFC set to  0.000000
8/9/2011	11:53:05 AM	SiCl4 MFC set to  0.000000
8/9/2011	11:53:05 AM	Bypass solenoid MFC set to  0.000000
8/9/2011	11:53:06 AM	Tube furnace set to 100
8/9/2011	11:53:36 AM	Helium valve closed
8/9/2011	11:53:36 AM	H2 valve closed
8/9/2011	11:53:36 AM	BCl3 valve closed
8/9/2011	11:53:36 AM	PH3 valve closed
8/9/2011	11:53:36 AM	SiCl4 pre valve closed
8/9/2011	11:53:36 AM	SiCl4 post valve closed
8/9/2011	11:53:36 AM	Bypass valve closed
8/9/2011	11:53:36 AM	Bubbler valve closed
8/9/2011	11:53:36 AM	Main Vac valve opened
8/9/2011	11:53:36 AM	Helium MFC set to  0.000000
8/9/2011	11:53:36 AM	H2 MFC set to  0.000000
8/9/2011	11:53:36 AM	BCl3 MFC set to  0.000000
8/9/2011	11:53:36 AM	PHl3 MFC set to  0.000000
8/9/2011	11:53:36 AM	SiCl4 MFC set to  0.000000
8/9/2011	11:53:36 AM	Bypass solenoid MFC set to  0.000000
8/9/2011	11:53:36 AM	Tube furnace set to 100
8/9/2011	11:54:06 AM	H2 valve closed
8/9/2011	11:54:06 AM	BCl3 valve closed
8/9/2011	11:54:06 AM	PH3 valve closed
8/9/2011	11:54:06 AM	SiCl4 pre valve closed
8/9/2011	11:54:06 AM	SiCl4 post valve closed
8/9/2011	11:54:06 AM	Bypass valve closed
8/9/2011	11:54:06 AM	Bubbler valve closed
8/9/2011	11:54:06 AM	Helium valve opened
8/9/2011	11:54:06 AM	Main Vac valve opened
8/9/2011	11:54:06 AM	Helium MFC set to  20.000000
8/9/2011	11:54:06 AM	H2 MFC set to  0.000000
8/9/2011	11:54:06 AM	BCl3 MFC set to  0.000000
8/9/2011	11:54:06 AM	PHl3 MFC set to  0.000000
8/9/2011	11:54:06 AM	SiCl4 MFC set to  0.000000
8/9/2011	11:54:06 AM	Bypass solenoid MFC set to  0.000000
8/9/2011	11:54:06 AM	Tube furnace set to 100
8/9/2011	11:54:36 AM	Helium valve closed
8/9/2011	11:54:36 AM	H2 valve closed
8/9/2011	11:54:36 AM	BCl3 valve closed
8/9/2011	11:54:36 AM	PH3 valve closed
8/9/2011	11:54:36 AM	SiCl4 pre valve closed
8/9/2011	11:54:36 AM	SiCl4 post valve closed
8/9/2011	11:54:36 AM	Bypass valve closed
8/9/2011	11:54:36 AM	Bubbler valve closed
8/9/2011	11:54:36 AM	Main Vac valve opened
8/9/2011	11:54:36 AM	Helium MFC set to  0.000000
8/9/2011	11:54:36 AM	H2 MFC set to  0.000000
8/9/2011	11:54:36 AM	BCl3 MFC set to  0.000000
8/9/2011	11:54:36 AM	PHl3 MFC set to  0.000000
8/9/2011	11:54:36 AM	SiCl4 MFC set to  0.000000
8/9/2011	11:54:36 AM	Bypass solenoid MFC set to  0.000000
8/9/2011	11:54:36 AM	Tube furnace set to 100
8/9/2011	11:55:06 AM	H2 valve closed
8/9/2011	11:55:06 AM	BCl3 valve closed
8/9/2011	11:55:06 AM	PH3 valve closed
8/9/2011	11:55:06 AM	SiCl4 pre valve closed
8/9/2011	11:55:06 AM	SiCl4 post valve closed
8/9/2011	11:55:06 AM	Bypass valve closed
8/9/2011	11:55:06 AM	Bubbler valve closed
8/9/2011	11:55:06 AM	Helium valve opened
8/9/2011	11:55:06 AM	Main Vac valve opened
8/9/2011	11:55:06 AM	Helium MFC set to  20.000000
8/9/2011	11:55:06 AM	H2 MFC set to  0.000000
8/9/2011	11:55:06 AM	BCl3 MFC set to  0.000000
8/9/2011	11:55:06 AM	PHl3 MFC set to  0.000000
8/9/2011	11:55:06 AM	SiCl4 MFC set to  0.000000
8/9/2011	11:55:06 AM	Bypass solenoid MFC set to  0.000000
8/9/2011	11:55:06 AM	Tube furnace set to 100
8/9/2011	11:55:37 AM	Helium valve closed
8/9/2011	11:55:37 AM	H2 valve closed
8/9/2011	11:55:37 AM	BCl3 valve closed
8/9/2011	11:55:37 AM	PH3 valve closed
8/9/2011	11:55:37 AM	SiCl4 pre valve closed
8/9/2011	11:55:37 AM	SiCl4 post valve closed
8/9/2011	11:55:37 AM	Bypass valve closed
8/9/2011	11:55:37 AM	Bubbler valve closed
8/9/2011	11:55:37 AM	Main Vac valve opened
8/9/2011	11:55:37 AM	Helium MFC set to  0.000000
8/9/2011	11:55:37 AM	H2 MFC set to  0.000000
8/9/2011	11:55:37 AM	BCl3 MFC set to  0.000000
8/9/2011	11:55:37 AM	PHl3 MFC set to  0.000000
8/9/2011	11:55:37 AM	SiCl4 MFC set to  0.000000
8/9/2011	11:55:37 AM	Bypass solenoid MFC set to  0.000000
8/9/2011	11:55:37 AM	Tube furnace set to 100
8/9/2011	11:56:07 AM	H2 valve closed
8/9/2011	11:56:07 AM	BCl3 valve closed
8/9/2011	11:56:07 AM	PH3 valve closed
8/9/2011	11:56:07 AM	SiCl4 pre valve closed
8/9/2011	11:56:07 AM	SiCl4 post valve closed
8/9/2011	11:56:07 AM	Bypass valve closed
8/9/2011	11:56:07 AM	Bubbler valve closed
8/9/2011	11:56:07 AM	Helium valve opened
8/9/2011	11:56:07 AM	Main Vac valve opened
8/9/2011	11:56:07 AM	Helium MFC set to  20.000000
8/9/2011	11:56:07 AM	H2 MFC set to  0.000000
8/9/2011	11:56:07 AM	BCl3 MFC set to  0.000000
8/9/2011	11:56:07 AM	PHl3 MFC set to  0.000000
8/9/2011	11:56:07 AM	SiCl4 MFC set to  0.000000
8/9/2011	11:56:07 AM	Bypass solenoid MFC set to  0.000000
8/9/2011	11:56:07 AM	Tube furnace set to 100
8/9/2011	11:56:37 AM	Helium valve closed
8/9/2011	11:56:37 AM	H2 valve closed
8/9/2011	11:56:37 AM	BCl3 valve closed
8/9/2011	11:56:37 AM	PH3 valve closed
8/9/2011	11:56:37 AM	SiCl4 pre valve closed
8/9/2011	11:56:37 AM	SiCl4 post valve closed
8/9/2011	11:56:37 AM	Bypass valve closed
8/9/2011	11:56:37 AM	Bubbler valve closed
8/9/2011	11:56:37 AM	Main Vac valve opened
8/9/2011	11:56:37 AM	Helium MFC set to  0.000000
8/9/2011	11:56:37 AM	H2 MFC set to  0.000000
8/9/2011	11:56:37 AM	BCl3 MFC set to  0.000000
8/9/2011	11:56:37 AM	PHl3 MFC set to  0.000000
8/9/2011	11:56:37 AM	SiCl4 MFC set to  0.000000
8/9/2011	11:56:37 AM	Bypass solenoid MFC set to  0.000000
8/9/2011	11:56:37 AM	Tube furnace set to 100
8/9/2011	11:57:07 AM	H2 valve closed
8/9/2011	11:57:07 AM	BCl3 valve closed
8/9/2011	11:57:07 AM	PH3 valve closed
8/9/2011	11:57:07 AM	SiCl4 pre valve closed
8/9/2011	11:57:07 AM	SiCl4 post valve closed
8/9/2011	11:57:07 AM	Bypass valve closed
8/9/2011	11:57:07 AM	Bubbler valve closed
8/9/2011	11:57:07 AM	Helium valve opened
8/9/2011	11:57:07 AM	Main Vac valve opened
8/9/2011	11:57:07 AM	Helium MFC set to  20.000000
8/9/2011	11:57:07 AM	H2 MFC set to  0.000000
8/9/2011	11:57:07 AM	BCl3 MFC set to  0.000000
8/9/2011	11:57:07 AM	PHl3 MFC set to  0.000000
8/9/2011	11:57:07 AM	SiCl4 MFC set to  0.000000
8/9/2011	11:57:07 AM	Bypass solenoid MFC set to  0.000000
8/9/2011	11:57:07 AM	Tube furnace set to 100
8/9/2011	11:57:37 AM	Helium valve closed
8/9/2011	11:57:37 AM	H2 valve closed
8/9/2011	11:57:37 AM	BCl3 valve closed
8/9/2011	11:57:37 AM	PH3 valve closed
8/9/2011	11:57:37 AM	SiCl4 pre valve closed
8/9/2011	11:57:37 AM	SiCl4 post valve closed
8/9/2011	11:57:37 AM	Bypass valve closed
8/9/2011	11:57:37 AM	Bubbler valve closed
8/9/2011	11:57:37 AM	Main Vac valve opened
8/9/2011	11:57:37 AM	Helium MFC set to  0.000000
8/9/2011	11:57:37 AM	H2 MFC set to  0.000000
8/9/2011	11:57:37 AM	BCl3 MFC set to  0.000000
8/9/2011	11:57:37 AM	PHl3 MFC set to  0.000000
8/9/2011	11:57:37 AM	SiCl4 MFC set to  0.000000
8/9/2011	11:57:37 AM	Bypass solenoid MFC set to  0.000000
8/9/2011	11:57:38 AM	Tube furnace set to 100
8/9/2011	11:58:08 AM	H2 valve closed
8/9/2011	11:58:08 AM	BCl3 valve closed
8/9/2011	11:58:08 AM	PH3 valve closed
8/9/2011	11:58:08 AM	SiCl4 pre valve closed
8/9/2011	11:58:08 AM	SiCl4 post valve closed
8/9/2011	11:58:08 AM	Bypass valve closed
8/9/2011	11:58:08 AM	Bubbler valve closed
8/9/2011	11:58:08 AM	Helium valve opened
8/9/2011	11:58:08 AM	Main Vac valve opened
8/9/2011	11:58:08 AM	Helium MFC set to  20.000000
8/9/2011	11:58:08 AM	H2 MFC set to  0.000000
8/9/2011	11:58:08 AM	BCl3 MFC set to  0.000000
8/9/2011	11:58:08 AM	PHl3 MFC set to  0.000000
8/9/2011	11:58:08 AM	SiCl4 MFC set to  0.000000
8/9/2011	11:58:08 AM	Bypass solenoid MFC set to  0.000000
8/9/2011	11:58:08 AM	Tube furnace set to 100
8/9/2011	11:58:38 AM	Helium valve closed
8/9/2011	11:58:38 AM	H2 valve closed
8/9/2011	11:58:38 AM	BCl3 valve closed
8/9/2011	11:58:38 AM	PH3 valve closed
8/9/2011	11:58:38 AM	SiCl4 pre valve closed
8/9/2011	11:58:38 AM	SiCl4 post valve closed
8/9/2011	11:58:38 AM	Bypass valve closed
8/9/2011	11:58:38 AM	Bubbler valve closed
8/9/2011	11:58:38 AM	Main Vac valve opened
8/9/2011	11:58:38 AM	Helium MFC set to  0.000000
8/9/2011	11:58:38 AM	H2 MFC set to  0.000000
8/9/2011	11:58:38 AM	BCl3 MFC set to  0.000000
8/9/2011	11:58:38 AM	PHl3 MFC set to  0.000000
8/9/2011	11:58:38 AM	SiCl4 MFC set to  0.000000
8/9/2011	11:58:38 AM	Bypass solenoid MFC set to  0.000000
8/9/2011	11:58:38 AM	Tube furnace set to 100
8/9/2011	11:59:08 AM	H2 valve closed
8/9/2011	11:59:08 AM	BCl3 valve closed
8/9/2011	11:59:08 AM	PH3 valve closed
8/9/2011	11:59:08 AM	SiCl4 pre valve closed
8/9/2011	11:59:08 AM	SiCl4 post valve closed
8/9/2011	11:59:08 AM	Bypass valve closed
8/9/2011	11:59:08 AM	Bubbler valve closed
8/9/2011	11:59:08 AM	Helium valve opened
8/9/2011	11:59:08 AM	Main Vac valve opened
8/9/2011	11:59:08 AM	Helium MFC set to  20.000000
8/9/2011	11:59:08 AM	H2 MFC set to  0.000000
8/9/2011	11:59:08 AM	BCl3 MFC set to  0.000000
8/9/2011	11:59:08 AM	PHl3 MFC set to  0.000000
8/9/2011	11:59:08 AM	SiCl4 MFC set to  0.000000
8/9/2011	11:59:08 AM	Bypass solenoid MFC set to  0.000000
8/9/2011	11:59:08 AM	Tube furnace set to 100
8/9/2011	11:59:38 AM	Helium valve closed
8/9/2011	11:59:38 AM	H2 valve closed
8/9/2011	11:59:38 AM	BCl3 valve closed
8/9/2011	11:59:38 AM	PH3 valve closed
8/9/2011	11:59:38 AM	SiCl4 pre valve closed
8/9/2011	11:59:38 AM	SiCl4 post valve closed
8/9/2011	11:59:38 AM	Bypass valve closed
8/9/2011	11:59:38 AM	Bubbler valve closed
8/9/2011	11:59:38 AM	Main Vac valve opened
8/9/2011	11:59:38 AM	Helium MFC set to  0.000000
8/9/2011	11:59:38 AM	H2 MFC set to  0.000000
8/9/2011	11:59:38 AM	BCl3 MFC set to  0.000000
8/9/2011	11:59:38 AM	PHl3 MFC set to  0.000000
8/9/2011	11:59:38 AM	SiCl4 MFC set to  0.000000
8/9/2011	11:59:38 AM	Bypass solenoid MFC set to  0.000000
8/9/2011	11:59:38 AM	Tube furnace set to 100
8/9/2011	11:59:39 AM	Run finished at 11:59 AM
8/9/2011	12:02:48 PM	Recipe started at 12:02 PM
8/9/2011	12:02:48 PM	Helium valve closed
8/9/2011	12:02:48 PM	H2 valve closed
8/9/2011	12:02:48 PM	BCl3 valve closed
8/9/2011	12:02:48 PM	PH3 valve closed
8/9/2011	12:02:48 PM	SiCl4 pre valve closed
8/9/2011	12:02:48 PM	SiCl4 post valve closed
8/9/2011	12:02:48 PM	Main Vac valve closed
8/9/2011	12:02:48 PM	Bypass valve closed
8/9/2011	12:02:48 PM	Bubbler valve closed
8/9/2011	12:02:48 PM	Helium MFC set to  0.000000
8/9/2011	12:02:48 PM	H2 MFC set to  0.000000
8/9/2011	12:02:48 PM	BCl3 MFC set to  0.000000
8/9/2011	12:02:48 PM	PHl3 MFC set to  0.000000
8/9/2011	12:02:48 PM	SiCl4 MFC set to  0.000000
8/9/2011	12:02:48 PM	Bypass solenoid MFC set to  0.000000
8/9/2011	12:02:48 PM	Tube furnace set to 0
8/9/2011	12:02:51 PM	Helium valve closed
8/9/2011	12:02:51 PM	BCl3 valve closed
8/9/2011	12:02:51 PM	PH3 valve closed
8/9/2011	12:02:51 PM	SiCl4 pre valve closed
8/9/2011	12:02:51 PM	SiCl4 post valve closed
8/9/2011	12:02:51 PM	Main Vac valve closed
8/9/2011	12:02:51 PM	Bypass valve closed
8/9/2011	12:02:51 PM	Bubbler valve closed
8/9/2011	12:02:51 PM	H2 valve opened
8/9/2011	12:02:51 PM	Helium MFC set to  0.000000
8/9/2011	12:02:51 PM	H2 MFC set to  500.000000
8/9/2011	12:02:51 PM	BCl3 MFC set to  0.000000
8/9/2011	12:02:51 PM	PHl3 MFC set to  0.000000
8/9/2011	12:02:51 PM	SiCl4 MFC set to  0.000000
8/9/2011	12:02:51 PM	Bypass solenoid MFC set to  0.000000
8/9/2011	12:02:52 PM	Tube furnace set to 0
8/9/2011	12:03:55 PM	Helium valve closed
8/9/2011	12:03:55 PM	BCl3 valve closed
8/9/2011	12:03:55 PM	PH3 valve closed
8/9/2011	12:03:55 PM	SiCl4 pre valve closed
8/9/2011	12:03:55 PM	SiCl4 post valve closed
8/9/2011	12:03:55 PM	Main Vac valve closed
8/9/2011	12:03:55 PM	Bypass valve closed
8/9/2011	12:03:55 PM	H2 valve opened
8/9/2011	12:03:55 PM	Bubbler valve opened
8/9/2011	12:03:55 PM	Helium MFC set to  0.000000
8/9/2011	12:03:55 PM	H2 MFC set to  500.000000
8/9/2011	12:03:55 PM	BCl3 MFC set to  0.000000
8/9/2011	12:03:55 PM	PHl3 MFC set to  0.000000
8/9/2011	12:03:55 PM	SiCl4 MFC set to  0.000000
8/9/2011	12:03:55 PM	Bypass solenoid MFC set to  0.000000
8/9/2011	12:03:56 PM	Tube furnace set to 0
8/9/2011	12:03:57 PM	Helium valve closed
8/9/2011	12:03:57 PM	BCl3 valve closed
8/9/2011	12:03:57 PM	PH3 valve closed
8/9/2011	12:03:57 PM	SiCl4 pre valve closed
8/9/2011	12:03:57 PM	SiCl4 post valve closed
8/9/2011	12:03:57 PM	Main Vac valve closed
8/9/2011	12:03:57 PM	Bypass valve closed
8/9/2011	12:03:57 PM	H2 valve opened
8/9/2011	12:03:57 PM	Bubbler valve opened
8/9/2011	12:03:57 PM	Helium MFC set to  0.000000
8/9/2011	12:03:57 PM	H2 MFC set to  500.000000
8/9/2011	12:03:57 PM	BCl3 MFC set to  0.000000
8/9/2011	12:03:57 PM	PHl3 MFC set to  0.000000
8/9/2011	12:03:57 PM	SiCl4 MFC set to  0.000000
8/9/2011	12:03:57 PM	Bypass solenoid MFC set to  0.000000
8/9/2011	12:03:57 PM	Tube furnace set to 1000
8/9/2011	12:23:57 PM	Helium valve closed
8/9/2011	12:23:57 PM	PH3 valve closed
8/9/2011	12:23:57 PM	Main Vac valve closed
8/9/2011	12:23:57 PM	Bypass valve closed
8/9/2011	12:23:57 PM	H2 valve opened
8/9/2011	12:23:57 PM	BCl3 valve opened
8/9/2011	12:23:57 PM	SiCl4 pre valve opened
8/9/2011	12:23:57 PM	SiCl4 post valve opened
8/9/2011	12:23:57 PM	Bubbler valve opened
8/9/2011	12:23:57 PM	Helium MFC set to  0.000000
8/9/2011	12:23:57 PM	H2 MFC set to  500.000000
8/9/2011	12:23:57 PM	BCl3 MFC set to  2.300000
8/9/2011	12:23:57 PM	PHl3 MFC set to  0.000000
8/9/2011	12:23:57 PM	SiCl4 MFC set to  50.000000
8/9/2011	12:23:57 PM	Bypass solenoid MFC set to  0.000000
8/9/2011	12:23:57 PM	Tube furnace set to 1000
8/9/2011	12:39:57 PM	Helium valve closed
8/9/2011	12:39:57 PM	BCl3 valve closed
8/9/2011	12:39:57 PM	PH3 valve closed
8/9/2011	12:39:57 PM	SiCl4 pre valve closed
8/9/2011	12:39:57 PM	SiCl4 post valve closed
8/9/2011	12:39:57 PM	Main Vac valve closed
8/9/2011	12:39:57 PM	Bypass valve closed
8/9/2011	12:39:57 PM	H2 valve opened
8/9/2011	12:39:57 PM	Bubbler valve opened
8/9/2011	12:39:57 PM	Helium MFC set to  0.000000
8/9/2011	12:39:57 PM	H2 MFC set to  500.000000
8/9/2011	12:39:57 PM	BCl3 MFC set to  0.000000
8/9/2011	12:39:57 PM	PHl3 MFC set to  0.000000
8/9/2011	12:39:57 PM	SiCl4 MFC set to  0.000000
8/9/2011	12:39:57 PM	Bypass solenoid MFC set to  0.000000
8/9/2011	12:39:57 PM	Tube furnace set to 750
8/9/2011	12:44:57 PM	H2 valve closed
8/9/2011	12:44:57 PM	BCl3 valve closed
8/9/2011	12:44:57 PM	PH3 valve closed
8/9/2011	12:44:57 PM	SiCl4 pre valve closed
8/9/2011	12:44:57 PM	SiCl4 post valve closed
8/9/2011	12:44:57 PM	Main Vac valve closed
8/9/2011	12:44:57 PM	Bypass valve closed
8/9/2011	12:44:57 PM	Helium valve opened
8/9/2011	12:44:57 PM	Bubbler valve opened
8/9/2011	12:44:57 PM	Helium MFC set to  500.000000
8/9/2011	12:44:57 PM	H2 MFC set to  0.000000
8/9/2011	12:44:57 PM	BCl3 MFC set to  0.000000
8/9/2011	12:44:57 PM	PHl3 MFC set to  0.000000
8/9/2011	12:44:57 PM	SiCl4 MFC set to  0.000000
8/9/2011	12:44:57 PM	Bypass solenoid MFC set to  0.000000
8/9/2011	12:44:57 PM	Tube furnace set to 0
8/9/2011	1:04:57 PM	Helium valve closed
8/9/2011	1:04:57 PM	H2 valve closed
8/9/2011	1:04:57 PM	BCl3 valve closed
8/9/2011	1:04:57 PM	PH3 valve closed
8/9/2011	1:04:57 PM	SiCl4 pre valve closed
8/9/2011	1:04:57 PM	SiCl4 post valve closed
8/9/2011	1:04:57 PM	Main Vac valve closed
8/9/2011	1:04:57 PM	Bypass valve closed
8/9/2011	1:04:57 PM	Bubbler valve closed
8/9/2011	1:04:57 PM	Helium MFC set to  0.000000
8/9/2011	1:04:57 PM	H2 MFC set to  0.000000
8/9/2011	1:04:57 PM	BCl3 MFC set to  0.000000
8/9/2011	1:04:57 PM	PHl3 MFC set to  0.000000
8/9/2011	1:04:57 PM	SiCl4 MFC set to  0.000000
8/9/2011	1:04:57 PM	Bypass solenoid MFC set to  0.000000
8/9/2011	1:04:57 PM	Tube furnace set to 0
8/9/2011	1:04:58 PM	Run finished at 1:04 PM
8/9/2011	1:05:35 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/9/2011	1:05:36 PM	Recipe started at 1:05 PM
8/9/2011	1:05:36 PM	Helium valve closed
8/9/2011	1:05:36 PM	H2 valve closed
8/9/2011	1:05:36 PM	BCl3 valve closed
8/9/2011	1:05:36 PM	PH3 valve closed
8/9/2011	1:05:36 PM	SiCl4 pre valve closed
8/9/2011	1:05:36 PM	SiCl4 post valve closed
8/9/2011	1:05:36 PM	Main Vac valve closed
8/9/2011	1:05:36 PM	Bypass valve closed
8/9/2011	1:05:36 PM	Bubbler valve closed
8/9/2011	1:05:36 PM	Helium MFC set to  0.000000
8/9/2011	1:05:36 PM	H2 MFC set to  0.000000
8/9/2011	1:05:36 PM	BCl3 MFC set to  0.000000
8/9/2011	1:05:36 PM	PHl3 MFC set to  0.000000
8/9/2011	1:05:36 PM	SiCl4 MFC set to  0.000000
8/9/2011	1:05:36 PM	Bypass solenoid MFC set to  0.000000
8/9/2011	1:05:36 PM	Tube furnace set to 0
8/9/2011	1:05:39 PM	H2 valve closed
8/9/2011	1:05:39 PM	BCl3 valve closed
8/9/2011	1:05:39 PM	PH3 valve closed
8/9/2011	1:05:39 PM	SiCl4 pre valve closed
8/9/2011	1:05:39 PM	SiCl4 post valve closed
8/9/2011	1:05:39 PM	Main Vac valve closed
8/9/2011	1:05:39 PM	Bypass valve closed
8/9/2011	1:05:39 PM	Bubbler valve closed
8/9/2011	1:05:39 PM	Helium valve opened
8/9/2011	1:05:39 PM	Helium MFC set to  500.000000
8/9/2011	1:05:39 PM	H2 MFC set to  0.000000
8/9/2011	1:05:39 PM	BCl3 MFC set to  0.000000
8/9/2011	1:05:39 PM	PHl3 MFC set to  0.000000
8/9/2011	1:05:39 PM	SiCl4 MFC set to  0.000000
8/9/2011	1:05:39 PM	Bypass solenoid MFC set to  0.000000
8/9/2011	1:05:39 PM	Tube furnace set to 0
8/9/2011	1:05:40 PM	Helium valve closed
8/9/2011	1:05:40 PM	H2 valve closed
8/9/2011	1:05:40 PM	BCl3 valve closed
8/9/2011	1:05:40 PM	PH3 valve closed
8/9/2011	1:05:40 PM	SiCl4 pre valve closed
8/9/2011	1:05:40 PM	SiCl4 post valve closed
8/9/2011	1:05:40 PM	Main Vac valve closed
8/9/2011	1:05:40 PM	Bypass valve closed
8/9/2011	1:05:40 PM	Bubbler valve closed
8/9/2011	1:05:40 PM	Helium MFC set to  0.000000
8/9/2011	1:05:40 PM	H2 MFC set to  0.000000
8/9/2011	1:05:40 PM	BCl3 MFC set to  0.000000
8/9/2011	1:05:40 PM	PHl3 MFC set to  0.000000
8/9/2011	1:05:40 PM	SiCl4 MFC set to  0.000000
8/9/2011	1:05:40 PM	Bypass solenoid MFC set to  0.000000
8/9/2011	1:05:40 PM	Tube furnace set to 0
8/9/2011	1:05:41 PM	Run finished at 1:05 PM
8/9/2011	1:05:41 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/9/2011	1:14:22 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/9/2011	1:14:23 PM	Recipe started at 1:14 PM
8/9/2011	1:14:23 PM	Helium valve closed
8/9/2011	1:14:23 PM	H2 valve closed
8/9/2011	1:14:23 PM	BCl3 valve closed
8/9/2011	1:14:23 PM	PH3 valve closed
8/9/2011	1:14:23 PM	SiCl4 pre valve closed
8/9/2011	1:14:23 PM	SiCl4 post valve closed
8/9/2011	1:14:23 PM	Main Vac valve closed
8/9/2011	1:14:23 PM	Bubbler valve closed
8/9/2011	1:14:23 PM	Bypass valve opened
8/9/2011	1:14:23 PM	Helium MFC set to  0.000000
8/9/2011	1:14:23 PM	H2 MFC set to  0.000000
8/9/2011	1:14:23 PM	BCl3 MFC set to  0.000000
8/9/2011	1:14:23 PM	PHl3 MFC set to  0.000000
8/9/2011	1:14:23 PM	SiCl4 MFC set to  0.000000
8/9/2011	1:14:23 PM	Bypass solenoid MFC set to  0.000000
8/9/2011	1:14:23 PM	Tube furnace set to 0
8/9/2011	1:15:34 PM	Helium valve closed
8/9/2011	1:15:34 PM	H2 valve closed
8/9/2011	1:15:34 PM	BCl3 valve closed
8/9/2011	1:15:34 PM	PH3 valve closed
8/9/2011	1:15:34 PM	SiCl4 pre valve closed
8/9/2011	1:15:34 PM	SiCl4 post valve closed
8/9/2011	1:15:34 PM	Main Vac valve closed
8/9/2011	1:15:34 PM	Bubbler valve closed
8/9/2011	1:15:34 PM	Bypass valve opened
8/9/2011	1:15:34 PM	Helium MFC set to  0.000000
8/9/2011	1:15:34 PM	H2 MFC set to  0.000000
8/9/2011	1:15:34 PM	BCl3 MFC set to  0.000000
8/9/2011	1:15:34 PM	PHl3 MFC set to  0.000000
8/9/2011	1:15:34 PM	SiCl4 MFC set to  0.000000
8/9/2011	1:15:34 PM	Bypass solenoid MFC set to  0.000000
8/9/2011	1:15:34 PM	Tube furnace set to 0
8/9/2011	1:16:34 PM	Helium valve closed
8/9/2011	1:16:34 PM	H2 valve closed
8/9/2011	1:16:34 PM	BCl3 valve closed
8/9/2011	1:16:34 PM	PH3 valve closed
8/9/2011	1:16:34 PM	SiCl4 pre valve closed
8/9/2011	1:16:34 PM	SiCl4 post valve closed
8/9/2011	1:16:34 PM	Bypass valve closed
8/9/2011	1:16:34 PM	Bubbler valve closed
8/9/2011	1:16:34 PM	Main Vac valve opened
8/9/2011	1:16:34 PM	Helium MFC set to  0.000000
8/9/2011	1:16:34 PM	H2 MFC set to  0.000000
8/9/2011	1:16:34 PM	BCl3 MFC set to  0.000000
8/9/2011	1:16:34 PM	PHl3 MFC set to  0.000000
8/9/2011	1:16:34 PM	SiCl4 MFC set to  0.000000
8/9/2011	1:16:34 PM	Bypass solenoid MFC set to  0.000000
8/9/2011	1:16:35 PM	Tube furnace set to 0
8/9/2011	1:16:36 PM	Run finished at 1:16 PM
8/9/2011	1:16:36 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/9/2011	1:18:48 PM	Recipe started at 1:18 PM
8/9/2011	1:18:48 PM	Helium valve closed
8/9/2011	1:18:48 PM	H2 valve closed
8/9/2011	1:18:48 PM	BCl3 valve closed
8/9/2011	1:18:48 PM	PH3 valve closed
8/9/2011	1:18:48 PM	SiCl4 pre valve closed
8/9/2011	1:18:48 PM	SiCl4 post valve closed
8/9/2011	1:18:48 PM	Bypass valve closed
8/9/2011	1:18:48 PM	Bubbler valve closed
8/9/2011	1:18:48 PM	Main Vac valve opened
8/9/2011	1:18:48 PM	Helium MFC set to  0.000000
8/9/2011	1:18:48 PM	H2 MFC set to  0.000000
8/9/2011	1:18:48 PM	BCl3 MFC set to  0.000000
8/9/2011	1:18:48 PM	PHl3 MFC set to  0.000000
8/9/2011	1:18:48 PM	SiCl4 MFC set to  0.000000
8/9/2011	1:18:48 PM	Bypass solenoid MFC set to  0.000000
8/9/2011	1:18:49 PM	Tube furnace set to 100
8/9/2011	1:19:19 PM	H2 valve closed
8/9/2011	1:19:19 PM	BCl3 valve closed
8/9/2011	1:19:19 PM	PH3 valve closed
8/9/2011	1:19:19 PM	SiCl4 pre valve closed
8/9/2011	1:19:19 PM	SiCl4 post valve closed
8/9/2011	1:19:19 PM	Bypass valve closed
8/9/2011	1:19:19 PM	Bubbler valve closed
8/9/2011	1:19:19 PM	Helium valve opened
8/9/2011	1:19:19 PM	Main Vac valve opened
8/9/2011	1:19:19 PM	Helium MFC set to  20.000000
8/9/2011	1:19:19 PM	H2 MFC set to  0.000000
8/9/2011	1:19:19 PM	BCl3 MFC set to  0.000000
8/9/2011	1:19:19 PM	PHl3 MFC set to  0.000000
8/9/2011	1:19:19 PM	SiCl4 MFC set to  0.000000
8/9/2011	1:19:19 PM	Bypass solenoid MFC set to  0.000000
8/9/2011	1:19:19 PM	Tube furnace set to 100
8/9/2011	1:19:49 PM	Helium valve closed
8/9/2011	1:19:49 PM	H2 valve closed
8/9/2011	1:19:49 PM	BCl3 valve closed
8/9/2011	1:19:49 PM	PH3 valve closed
8/9/2011	1:19:49 PM	SiCl4 pre valve closed
8/9/2011	1:19:49 PM	SiCl4 post valve closed
8/9/2011	1:19:49 PM	Bypass valve closed
8/9/2011	1:19:49 PM	Bubbler valve closed
8/9/2011	1:19:49 PM	Main Vac valve opened
8/9/2011	1:19:49 PM	Helium MFC set to  0.000000
8/9/2011	1:19:49 PM	H2 MFC set to  0.000000
8/9/2011	1:19:49 PM	BCl3 MFC set to  0.000000
8/9/2011	1:19:49 PM	PHl3 MFC set to  0.000000
8/9/2011	1:19:49 PM	SiCl4 MFC set to  0.000000
8/9/2011	1:19:49 PM	Bypass solenoid MFC set to  0.000000
8/9/2011	1:19:49 PM	Tube furnace set to 100
8/9/2011	1:20:19 PM	H2 valve closed
8/9/2011	1:20:19 PM	BCl3 valve closed
8/9/2011	1:20:19 PM	PH3 valve closed
8/9/2011	1:20:19 PM	SiCl4 pre valve closed
8/9/2011	1:20:19 PM	SiCl4 post valve closed
8/9/2011	1:20:19 PM	Bypass valve closed
8/9/2011	1:20:19 PM	Bubbler valve closed
8/9/2011	1:20:19 PM	Helium valve opened
8/9/2011	1:20:19 PM	Main Vac valve opened
8/9/2011	1:20:19 PM	Helium MFC set to  20.000000
8/9/2011	1:20:19 PM	H2 MFC set to  0.000000
8/9/2011	1:20:19 PM	BCl3 MFC set to  0.000000
8/9/2011	1:20:19 PM	PHl3 MFC set to  0.000000
8/9/2011	1:20:19 PM	SiCl4 MFC set to  0.000000
8/9/2011	1:20:19 PM	Bypass solenoid MFC set to  0.000000
8/9/2011	1:20:19 PM	Tube furnace set to 100
8/9/2011	1:20:49 PM	Helium valve closed
8/9/2011	1:20:49 PM	H2 valve closed
8/9/2011	1:20:49 PM	BCl3 valve closed
8/9/2011	1:20:49 PM	PH3 valve closed
8/9/2011	1:20:49 PM	SiCl4 pre valve closed
8/9/2011	1:20:49 PM	SiCl4 post valve closed
8/9/2011	1:20:49 PM	Bypass valve closed
8/9/2011	1:20:49 PM	Bubbler valve closed
8/9/2011	1:20:49 PM	Main Vac valve opened
8/9/2011	1:20:49 PM	Helium MFC set to  0.000000
8/9/2011	1:20:49 PM	H2 MFC set to  0.000000
8/9/2011	1:20:49 PM	BCl3 MFC set to  0.000000
8/9/2011	1:20:49 PM	PHl3 MFC set to  0.000000
8/9/2011	1:20:49 PM	SiCl4 MFC set to  0.000000
8/9/2011	1:20:49 PM	Bypass solenoid MFC set to  0.000000
8/9/2011	1:20:49 PM	Tube furnace set to 100
8/9/2011	1:21:19 PM	H2 valve closed
8/9/2011	1:21:19 PM	BCl3 valve closed
8/9/2011	1:21:19 PM	PH3 valve closed
8/9/2011	1:21:19 PM	SiCl4 pre valve closed
8/9/2011	1:21:19 PM	SiCl4 post valve closed
8/9/2011	1:21:19 PM	Bypass valve closed
8/9/2011	1:21:19 PM	Bubbler valve closed
8/9/2011	1:21:19 PM	Helium valve opened
8/9/2011	1:21:19 PM	Main Vac valve opened
8/9/2011	1:21:19 PM	Helium MFC set to  20.000000
8/9/2011	1:21:19 PM	H2 MFC set to  0.000000
8/9/2011	1:21:19 PM	BCl3 MFC set to  0.000000
8/9/2011	1:21:19 PM	PHl3 MFC set to  0.000000
8/9/2011	1:21:19 PM	SiCl4 MFC set to  0.000000
8/9/2011	1:21:19 PM	Bypass solenoid MFC set to  0.000000
8/9/2011	1:21:20 PM	Tube furnace set to 100
8/9/2011	1:21:50 PM	Helium valve closed
8/9/2011	1:21:50 PM	H2 valve closed
8/9/2011	1:21:50 PM	BCl3 valve closed
8/9/2011	1:21:50 PM	PH3 valve closed
8/9/2011	1:21:50 PM	SiCl4 pre valve closed
8/9/2011	1:21:50 PM	SiCl4 post valve closed
8/9/2011	1:21:50 PM	Bypass valve closed
8/9/2011	1:21:50 PM	Bubbler valve closed
8/9/2011	1:21:50 PM	Main Vac valve opened
8/9/2011	1:21:50 PM	Helium MFC set to  0.000000
8/9/2011	1:21:50 PM	H2 MFC set to  0.000000
8/9/2011	1:21:50 PM	BCl3 MFC set to  0.000000
8/9/2011	1:21:50 PM	PHl3 MFC set to  0.000000
8/9/2011	1:21:50 PM	SiCl4 MFC set to  0.000000
8/9/2011	1:21:50 PM	Bypass solenoid MFC set to  0.000000
8/9/2011	1:21:50 PM	Tube furnace set to 100
8/9/2011	1:22:20 PM	H2 valve closed
8/9/2011	1:22:20 PM	BCl3 valve closed
8/9/2011	1:22:20 PM	PH3 valve closed
8/9/2011	1:22:20 PM	SiCl4 pre valve closed
8/9/2011	1:22:20 PM	SiCl4 post valve closed
8/9/2011	1:22:20 PM	Bypass valve closed
8/9/2011	1:22:20 PM	Bubbler valve closed
8/9/2011	1:22:20 PM	Helium valve opened
8/9/2011	1:22:20 PM	Main Vac valve opened
8/9/2011	1:22:20 PM	Helium MFC set to  20.000000
8/9/2011	1:22:20 PM	H2 MFC set to  0.000000
8/9/2011	1:22:20 PM	BCl3 MFC set to  0.000000
8/9/2011	1:22:20 PM	PHl3 MFC set to  0.000000
8/9/2011	1:22:20 PM	SiCl4 MFC set to  0.000000
8/9/2011	1:22:20 PM	Bypass solenoid MFC set to  0.000000
8/9/2011	1:22:20 PM	Tube furnace set to 100
8/9/2011	1:22:50 PM	Helium valve closed
8/9/2011	1:22:50 PM	H2 valve closed
8/9/2011	1:22:50 PM	BCl3 valve closed
8/9/2011	1:22:50 PM	PH3 valve closed
8/9/2011	1:22:50 PM	SiCl4 pre valve closed
8/9/2011	1:22:50 PM	SiCl4 post valve closed
8/9/2011	1:22:50 PM	Bypass valve closed
8/9/2011	1:22:50 PM	Bubbler valve closed
8/9/2011	1:22:50 PM	Main Vac valve opened
8/9/2011	1:22:50 PM	Helium MFC set to  0.000000
8/9/2011	1:22:50 PM	H2 MFC set to  0.000000
8/9/2011	1:22:50 PM	BCl3 MFC set to  0.000000
8/9/2011	1:22:50 PM	PHl3 MFC set to  0.000000
8/9/2011	1:22:50 PM	SiCl4 MFC set to  0.000000
8/9/2011	1:22:50 PM	Bypass solenoid MFC set to  0.000000
8/9/2011	1:22:50 PM	Tube furnace set to 100
8/9/2011	1:23:20 PM	H2 valve closed
8/9/2011	1:23:20 PM	BCl3 valve closed
8/9/2011	1:23:20 PM	PH3 valve closed
8/9/2011	1:23:20 PM	SiCl4 pre valve closed
8/9/2011	1:23:20 PM	SiCl4 post valve closed
8/9/2011	1:23:20 PM	Bypass valve closed
8/9/2011	1:23:20 PM	Bubbler valve closed
8/9/2011	1:23:20 PM	Helium valve opened
8/9/2011	1:23:20 PM	Main Vac valve opened
8/9/2011	1:23:20 PM	Helium MFC set to  20.000000
8/9/2011	1:23:20 PM	H2 MFC set to  0.000000
8/9/2011	1:23:20 PM	BCl3 MFC set to  0.000000
8/9/2011	1:23:20 PM	PHl3 MFC set to  0.000000
8/9/2011	1:23:20 PM	SiCl4 MFC set to  0.000000
8/9/2011	1:23:20 PM	Bypass solenoid MFC set to  0.000000
8/9/2011	1:23:20 PM	Tube furnace set to 100
8/9/2011	1:23:50 PM	Helium valve closed
8/9/2011	1:23:50 PM	H2 valve closed
8/9/2011	1:23:50 PM	BCl3 valve closed
8/9/2011	1:23:50 PM	PH3 valve closed
8/9/2011	1:23:50 PM	SiCl4 pre valve closed
8/9/2011	1:23:50 PM	SiCl4 post valve closed
8/9/2011	1:23:50 PM	Bypass valve closed
8/9/2011	1:23:50 PM	Bubbler valve closed
8/9/2011	1:23:50 PM	Main Vac valve opened
8/9/2011	1:23:50 PM	Helium MFC set to  0.000000
8/9/2011	1:23:50 PM	H2 MFC set to  0.000000
8/9/2011	1:23:50 PM	BCl3 MFC set to  0.000000
8/9/2011	1:23:50 PM	PHl3 MFC set to  0.000000
8/9/2011	1:23:50 PM	SiCl4 MFC set to  0.000000
8/9/2011	1:23:50 PM	Bypass solenoid MFC set to  0.000000
8/9/2011	1:23:51 PM	Tube furnace set to 100
8/9/2011	1:24:21 PM	H2 valve closed
8/9/2011	1:24:21 PM	BCl3 valve closed
8/9/2011	1:24:21 PM	PH3 valve closed
8/9/2011	1:24:21 PM	SiCl4 pre valve closed
8/9/2011	1:24:21 PM	SiCl4 post valve closed
8/9/2011	1:24:21 PM	Bypass valve closed
8/9/2011	1:24:21 PM	Bubbler valve closed
8/9/2011	1:24:21 PM	Helium valve opened
8/9/2011	1:24:21 PM	Main Vac valve opened
8/9/2011	1:24:21 PM	Helium MFC set to  20.000000
8/9/2011	1:24:21 PM	H2 MFC set to  0.000000
8/9/2011	1:24:21 PM	BCl3 MFC set to  0.000000
8/9/2011	1:24:21 PM	PHl3 MFC set to  0.000000
8/9/2011	1:24:21 PM	SiCl4 MFC set to  0.000000
8/9/2011	1:24:21 PM	Bypass solenoid MFC set to  0.000000
8/9/2011	1:24:21 PM	Tube furnace set to 100
8/9/2011	1:24:51 PM	Helium valve closed
8/9/2011	1:24:51 PM	H2 valve closed
8/9/2011	1:24:51 PM	BCl3 valve closed
8/9/2011	1:24:51 PM	PH3 valve closed
8/9/2011	1:24:51 PM	SiCl4 pre valve closed
8/9/2011	1:24:51 PM	SiCl4 post valve closed
8/9/2011	1:24:51 PM	Bypass valve closed
8/9/2011	1:24:51 PM	Bubbler valve closed
8/9/2011	1:24:51 PM	Main Vac valve opened
8/9/2011	1:24:51 PM	Helium MFC set to  0.000000
8/9/2011	1:24:51 PM	H2 MFC set to  0.000000
8/9/2011	1:24:51 PM	BCl3 MFC set to  0.000000
8/9/2011	1:24:51 PM	PHl3 MFC set to  0.000000
8/9/2011	1:24:51 PM	SiCl4 MFC set to  0.000000
8/9/2011	1:24:51 PM	Bypass solenoid MFC set to  0.000000
8/9/2011	1:24:51 PM	Tube furnace set to 100
8/9/2011	1:25:21 PM	H2 valve closed
8/9/2011	1:25:21 PM	BCl3 valve closed
8/9/2011	1:25:21 PM	PH3 valve closed
8/9/2011	1:25:21 PM	SiCl4 pre valve closed
8/9/2011	1:25:21 PM	SiCl4 post valve closed
8/9/2011	1:25:21 PM	Bypass valve closed
8/9/2011	1:25:21 PM	Bubbler valve closed
8/9/2011	1:25:21 PM	Helium valve opened
8/9/2011	1:25:21 PM	Main Vac valve opened
8/9/2011	1:25:21 PM	Helium MFC set to  20.000000
8/9/2011	1:25:21 PM	H2 MFC set to  0.000000
8/9/2011	1:25:21 PM	BCl3 MFC set to  0.000000
8/9/2011	1:25:21 PM	PHl3 MFC set to  0.000000
8/9/2011	1:25:21 PM	SiCl4 MFC set to  0.000000
8/9/2011	1:25:21 PM	Bypass solenoid MFC set to  0.000000
8/9/2011	1:25:21 PM	Tube furnace set to 100
8/9/2011	1:25:51 PM	Helium valve closed
8/9/2011	1:25:51 PM	H2 valve closed
8/9/2011	1:25:51 PM	BCl3 valve closed
8/9/2011	1:25:51 PM	PH3 valve closed
8/9/2011	1:25:51 PM	SiCl4 pre valve closed
8/9/2011	1:25:51 PM	SiCl4 post valve closed
8/9/2011	1:25:51 PM	Bypass valve closed
8/9/2011	1:25:51 PM	Bubbler valve closed
8/9/2011	1:25:51 PM	Main Vac valve opened
8/9/2011	1:25:51 PM	Helium MFC set to  0.000000
8/9/2011	1:25:51 PM	H2 MFC set to  0.000000
8/9/2011	1:25:51 PM	BCl3 MFC set to  0.000000
8/9/2011	1:25:51 PM	PHl3 MFC set to  0.000000
8/9/2011	1:25:51 PM	SiCl4 MFC set to  0.000000
8/9/2011	1:25:51 PM	Bypass solenoid MFC set to  0.000000
8/9/2011	1:25:51 PM	Tube furnace set to 100
8/9/2011	1:26:21 PM	H2 valve closed
8/9/2011	1:26:21 PM	BCl3 valve closed
8/9/2011	1:26:21 PM	PH3 valve closed
8/9/2011	1:26:21 PM	SiCl4 pre valve closed
8/9/2011	1:26:21 PM	SiCl4 post valve closed
8/9/2011	1:26:21 PM	Bypass valve closed
8/9/2011	1:26:21 PM	Bubbler valve closed
8/9/2011	1:26:21 PM	Helium valve opened
8/9/2011	1:26:21 PM	Main Vac valve opened
8/9/2011	1:26:21 PM	Helium MFC set to  20.000000
8/9/2011	1:26:21 PM	H2 MFC set to  0.000000
8/9/2011	1:26:21 PM	BCl3 MFC set to  0.000000
8/9/2011	1:26:21 PM	PHl3 MFC set to  0.000000
8/9/2011	1:26:21 PM	SiCl4 MFC set to  0.000000
8/9/2011	1:26:21 PM	Bypass solenoid MFC set to  0.000000
8/9/2011	1:26:22 PM	Tube furnace set to 100
8/9/2011	1:26:52 PM	Helium valve closed
8/9/2011	1:26:52 PM	H2 valve closed
8/9/2011	1:26:52 PM	BCl3 valve closed
8/9/2011	1:26:52 PM	PH3 valve closed
8/9/2011	1:26:52 PM	SiCl4 pre valve closed
8/9/2011	1:26:52 PM	SiCl4 post valve closed
8/9/2011	1:26:52 PM	Bypass valve closed
8/9/2011	1:26:52 PM	Bubbler valve closed
8/9/2011	1:26:52 PM	Main Vac valve opened
8/9/2011	1:26:52 PM	Helium MFC set to  0.000000
8/9/2011	1:26:52 PM	H2 MFC set to  0.000000
8/9/2011	1:26:52 PM	BCl3 MFC set to  0.000000
8/9/2011	1:26:52 PM	PHl3 MFC set to  0.000000
8/9/2011	1:26:52 PM	SiCl4 MFC set to  0.000000
8/9/2011	1:26:52 PM	Bypass solenoid MFC set to  0.000000
8/9/2011	1:26:52 PM	Tube furnace set to 100
8/9/2011	1:27:22 PM	H2 valve closed
8/9/2011	1:27:22 PM	BCl3 valve closed
8/9/2011	1:27:22 PM	PH3 valve closed
8/9/2011	1:27:22 PM	SiCl4 pre valve closed
8/9/2011	1:27:22 PM	SiCl4 post valve closed
8/9/2011	1:27:22 PM	Bypass valve closed
8/9/2011	1:27:22 PM	Bubbler valve closed
8/9/2011	1:27:22 PM	Helium valve opened
8/9/2011	1:27:22 PM	Main Vac valve opened
8/9/2011	1:27:22 PM	Helium MFC set to  20.000000
8/9/2011	1:27:22 PM	H2 MFC set to  0.000000
8/9/2011	1:27:22 PM	BCl3 MFC set to  0.000000
8/9/2011	1:27:22 PM	PHl3 MFC set to  0.000000
8/9/2011	1:27:22 PM	SiCl4 MFC set to  0.000000
8/9/2011	1:27:22 PM	Bypass solenoid MFC set to  0.000000
8/9/2011	1:27:22 PM	Tube furnace set to 100
8/9/2011	1:27:52 PM	Helium valve closed
8/9/2011	1:27:52 PM	H2 valve closed
8/9/2011	1:27:52 PM	BCl3 valve closed
8/9/2011	1:27:52 PM	PH3 valve closed
8/9/2011	1:27:52 PM	SiCl4 pre valve closed
8/9/2011	1:27:52 PM	SiCl4 post valve closed
8/9/2011	1:27:52 PM	Bypass valve closed
8/9/2011	1:27:52 PM	Bubbler valve closed
8/9/2011	1:27:52 PM	Main Vac valve opened
8/9/2011	1:27:52 PM	Helium MFC set to  0.000000
8/9/2011	1:27:52 PM	H2 MFC set to  0.000000
8/9/2011	1:27:52 PM	BCl3 MFC set to  0.000000
8/9/2011	1:27:52 PM	PHl3 MFC set to  0.000000
8/9/2011	1:27:52 PM	SiCl4 MFC set to  0.000000
8/9/2011	1:27:52 PM	Bypass solenoid MFC set to  0.000000
8/9/2011	1:27:52 PM	Tube furnace set to 100
8/9/2011	1:28:22 PM	H2 valve closed
8/9/2011	1:28:22 PM	BCl3 valve closed
8/9/2011	1:28:22 PM	PH3 valve closed
8/9/2011	1:28:22 PM	SiCl4 pre valve closed
8/9/2011	1:28:22 PM	SiCl4 post valve closed
8/9/2011	1:28:22 PM	Bypass valve closed
8/9/2011	1:28:22 PM	Bubbler valve closed
8/9/2011	1:28:22 PM	Helium valve opened
8/9/2011	1:28:22 PM	Main Vac valve opened
8/9/2011	1:28:22 PM	Helium MFC set to  20.000000
8/9/2011	1:28:22 PM	H2 MFC set to  0.000000
8/9/2011	1:28:22 PM	BCl3 MFC set to  0.000000
8/9/2011	1:28:22 PM	PHl3 MFC set to  0.000000
8/9/2011	1:28:22 PM	SiCl4 MFC set to  0.000000
8/9/2011	1:28:22 PM	Bypass solenoid MFC set to  0.000000
8/9/2011	1:28:22 PM	Tube furnace set to 100
8/9/2011	1:28:52 PM	Helium valve closed
8/9/2011	1:28:53 PM	H2 valve closed
8/9/2011	1:28:53 PM	BCl3 valve closed
8/9/2011	1:28:53 PM	PH3 valve closed
8/9/2011	1:28:53 PM	SiCl4 pre valve closed
8/9/2011	1:28:53 PM	SiCl4 post valve closed
8/9/2011	1:28:53 PM	Bypass valve closed
8/9/2011	1:28:53 PM	Bubbler valve closed
8/9/2011	1:28:53 PM	Main Vac valve opened
8/9/2011	1:28:53 PM	Helium MFC set to  0.000000
8/9/2011	1:28:53 PM	H2 MFC set to  0.000000
8/9/2011	1:28:53 PM	BCl3 MFC set to  0.000000
8/9/2011	1:28:53 PM	PHl3 MFC set to  0.000000
8/9/2011	1:28:53 PM	SiCl4 MFC set to  0.000000
8/9/2011	1:28:53 PM	Bypass solenoid MFC set to  0.000000
8/9/2011	1:28:53 PM	Tube furnace set to 100
8/9/2011	1:28:54 PM	Run finished at 1:28 PM
8/9/2011	1:31:03 PM	Recipe started at 1:31 PM
8/9/2011	1:31:03 PM	Helium valve closed
8/9/2011	1:31:03 PM	H2 valve closed
8/9/2011	1:31:03 PM	BCl3 valve closed
8/9/2011	1:31:03 PM	PH3 valve closed
8/9/2011	1:31:03 PM	SiCl4 pre valve closed
8/9/2011	1:31:03 PM	SiCl4 post valve closed
8/9/2011	1:31:03 PM	Main Vac valve closed
8/9/2011	1:31:03 PM	Bypass valve closed
8/9/2011	1:31:03 PM	Bubbler valve closed
8/9/2011	1:31:03 PM	Helium MFC set to  0.000000
8/9/2011	1:31:03 PM	H2 MFC set to  0.000000
8/9/2011	1:31:03 PM	BCl3 MFC set to  0.000000
8/9/2011	1:31:03 PM	PHl3 MFC set to  0.000000
8/9/2011	1:31:03 PM	SiCl4 MFC set to  0.000000
8/9/2011	1:31:03 PM	Bypass solenoid MFC set to  0.000000
8/9/2011	1:31:03 PM	Tube furnace set to 0
8/9/2011	1:31:06 PM	Helium valve closed
8/9/2011	1:31:06 PM	BCl3 valve closed
8/9/2011	1:31:06 PM	PH3 valve closed
8/9/2011	1:31:06 PM	SiCl4 pre valve closed
8/9/2011	1:31:06 PM	SiCl4 post valve closed
8/9/2011	1:31:06 PM	Main Vac valve closed
8/9/2011	1:31:06 PM	Bypass valve closed
8/9/2011	1:31:06 PM	Bubbler valve closed
8/9/2011	1:31:06 PM	H2 valve opened
8/9/2011	1:31:06 PM	Helium MFC set to  0.000000
8/9/2011	1:31:06 PM	H2 MFC set to  500.000000
8/9/2011	1:31:06 PM	BCl3 MFC set to  0.000000
8/9/2011	1:31:06 PM	PHl3 MFC set to  0.000000
8/9/2011	1:31:06 PM	SiCl4 MFC set to  0.000000
8/9/2011	1:31:06 PM	Bypass solenoid MFC set to  0.000000
8/9/2011	1:31:06 PM	Tube furnace set to 0
8/9/2011	1:32:10 PM	Helium valve closed
8/9/2011	1:32:10 PM	BCl3 valve closed
8/9/2011	1:32:10 PM	PH3 valve closed
8/9/2011	1:32:10 PM	SiCl4 pre valve closed
8/9/2011	1:32:10 PM	SiCl4 post valve closed
8/9/2011	1:32:10 PM	Main Vac valve closed
8/9/2011	1:32:10 PM	Bypass valve closed
8/9/2011	1:32:10 PM	H2 valve opened
8/9/2011	1:32:10 PM	Bubbler valve opened
8/9/2011	1:32:10 PM	Helium MFC set to  0.000000
8/9/2011	1:32:10 PM	H2 MFC set to  500.000000
8/9/2011	1:32:10 PM	BCl3 MFC set to  0.000000
8/9/2011	1:32:10 PM	PHl3 MFC set to  0.000000
8/9/2011	1:32:10 PM	SiCl4 MFC set to  0.000000
8/9/2011	1:32:10 PM	Bypass solenoid MFC set to  0.000000
8/9/2011	1:32:10 PM	Tube furnace set to 0
8/9/2011	1:32:11 PM	Helium valve closed
8/9/2011	1:32:11 PM	BCl3 valve closed
8/9/2011	1:32:11 PM	PH3 valve closed
8/9/2011	1:32:11 PM	SiCl4 pre valve closed
8/9/2011	1:32:11 PM	SiCl4 post valve closed
8/9/2011	1:32:11 PM	Main Vac valve closed
8/9/2011	1:32:11 PM	Bypass valve closed
8/9/2011	1:32:11 PM	H2 valve opened
8/9/2011	1:32:11 PM	Bubbler valve opened
8/9/2011	1:32:11 PM	Helium MFC set to  0.000000
8/9/2011	1:32:11 PM	H2 MFC set to  500.000000
8/9/2011	1:32:11 PM	BCl3 MFC set to  0.000000
8/9/2011	1:32:11 PM	PHl3 MFC set to  0.000000
8/9/2011	1:32:11 PM	SiCl4 MFC set to  0.000000
8/9/2011	1:32:11 PM	Bypass solenoid MFC set to  0.000000
8/9/2011	1:32:11 PM	Tube furnace set to 1000
8/9/2011	1:52:11 PM	Helium valve closed
8/9/2011	1:52:11 PM	PH3 valve closed
8/9/2011	1:52:11 PM	Main Vac valve closed
8/9/2011	1:52:11 PM	Bypass valve closed
8/9/2011	1:52:11 PM	H2 valve opened
8/9/2011	1:52:11 PM	BCl3 valve opened
8/9/2011	1:52:11 PM	SiCl4 pre valve opened
8/9/2011	1:52:11 PM	SiCl4 post valve opened
8/9/2011	1:52:11 PM	Bubbler valve opened
8/9/2011	1:52:11 PM	Helium MFC set to  0.000000
8/9/2011	1:52:11 PM	H2 MFC set to  500.000000
8/9/2011	1:52:11 PM	BCl3 MFC set to  2.300000
8/9/2011	1:52:11 PM	PHl3 MFC set to  0.000000
8/9/2011	1:52:11 PM	SiCl4 MFC set to  50.000000
8/9/2011	1:52:11 PM	Bypass solenoid MFC set to  0.000000
8/9/2011	1:52:11 PM	Tube furnace set to 1000
8/9/2011	2:08:11 PM	Helium valve closed
8/9/2011	2:08:11 PM	BCl3 valve closed
8/9/2011	2:08:11 PM	PH3 valve closed
8/9/2011	2:08:11 PM	SiCl4 pre valve closed
8/9/2011	2:08:11 PM	SiCl4 post valve closed
8/9/2011	2:08:11 PM	Main Vac valve closed
8/9/2011	2:08:11 PM	Bypass valve closed
8/9/2011	2:08:11 PM	H2 valve opened
8/9/2011	2:08:11 PM	Bubbler valve opened
8/9/2011	2:08:11 PM	Helium MFC set to  0.000000
8/9/2011	2:08:11 PM	H2 MFC set to  500.000000
8/9/2011	2:08:11 PM	BCl3 MFC set to  0.000000
8/9/2011	2:08:11 PM	PHl3 MFC set to  0.000000
8/9/2011	2:08:11 PM	SiCl4 MFC set to  0.000000
8/9/2011	2:08:11 PM	Bypass solenoid MFC set to  0.000000
8/9/2011	2:08:12 PM	Tube furnace set to 750
8/9/2011	2:13:12 PM	H2 valve closed
8/9/2011	2:13:12 PM	BCl3 valve closed
8/9/2011	2:13:12 PM	PH3 valve closed
8/9/2011	2:13:12 PM	SiCl4 pre valve closed
8/9/2011	2:13:12 PM	SiCl4 post valve closed
8/9/2011	2:13:12 PM	Main Vac valve closed
8/9/2011	2:13:12 PM	Bypass valve closed
8/9/2011	2:13:12 PM	Helium valve opened
8/9/2011	2:13:12 PM	Bubbler valve opened
8/9/2011	2:13:12 PM	Helium MFC set to  500.000000
8/9/2011	2:13:12 PM	H2 MFC set to  0.000000
8/9/2011	2:13:12 PM	BCl3 MFC set to  0.000000
8/9/2011	2:13:12 PM	PHl3 MFC set to  0.000000
8/9/2011	2:13:12 PM	SiCl4 MFC set to  0.000000
8/9/2011	2:13:12 PM	Bypass solenoid MFC set to  0.000000
8/9/2011	2:13:12 PM	Tube furnace set to 0
8/9/2011	2:33:12 PM	Helium valve closed
8/9/2011	2:33:12 PM	H2 valve closed
8/9/2011	2:33:12 PM	BCl3 valve closed
8/9/2011	2:33:12 PM	PH3 valve closed
8/9/2011	2:33:12 PM	SiCl4 pre valve closed
8/9/2011	2:33:12 PM	SiCl4 post valve closed
8/9/2011	2:33:12 PM	Main Vac valve closed
8/9/2011	2:33:12 PM	Bypass valve closed
8/9/2011	2:33:12 PM	Bubbler valve closed
8/9/2011	2:33:12 PM	Helium MFC set to  0.000000
8/9/2011	2:33:12 PM	H2 MFC set to  0.000000
8/9/2011	2:33:12 PM	BCl3 MFC set to  0.000000
8/9/2011	2:33:12 PM	PHl3 MFC set to  0.000000
8/9/2011	2:33:12 PM	SiCl4 MFC set to  0.000000
8/9/2011	2:33:12 PM	Bypass solenoid MFC set to  0.000000
8/9/2011	2:33:12 PM	Tube furnace set to 0
8/9/2011	2:33:13 PM	Run finished at 2:33 PM
8/9/2011	2:33:36 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/9/2011	2:33:37 PM	Recipe started at 2:33 PM
8/9/2011	2:33:37 PM	Helium valve closed
8/9/2011	2:33:37 PM	H2 valve closed
8/9/2011	2:33:37 PM	BCl3 valve closed
8/9/2011	2:33:37 PM	PH3 valve closed
8/9/2011	2:33:37 PM	SiCl4 pre valve closed
8/9/2011	2:33:37 PM	SiCl4 post valve closed
8/9/2011	2:33:37 PM	Main Vac valve closed
8/9/2011	2:33:37 PM	Bypass valve closed
8/9/2011	2:33:37 PM	Bubbler valve closed
8/9/2011	2:33:37 PM	Helium MFC set to  0.000000
8/9/2011	2:33:37 PM	H2 MFC set to  0.000000
8/9/2011	2:33:37 PM	BCl3 MFC set to  0.000000
8/9/2011	2:33:37 PM	PHl3 MFC set to  0.000000
8/9/2011	2:33:37 PM	SiCl4 MFC set to  0.000000
8/9/2011	2:33:37 PM	Bypass solenoid MFC set to  0.000000
8/9/2011	2:33:37 PM	Tube furnace set to 0
8/9/2011	2:33:40 PM	H2 valve closed
8/9/2011	2:33:40 PM	BCl3 valve closed
8/9/2011	2:33:40 PM	PH3 valve closed
8/9/2011	2:33:40 PM	SiCl4 pre valve closed
8/9/2011	2:33:40 PM	SiCl4 post valve closed
8/9/2011	2:33:40 PM	Main Vac valve closed
8/9/2011	2:33:40 PM	Bypass valve closed
8/9/2011	2:33:40 PM	Bubbler valve closed
8/9/2011	2:33:40 PM	Helium valve opened
8/9/2011	2:33:40 PM	Helium MFC set to  500.000000
8/9/2011	2:33:40 PM	H2 MFC set to  0.000000
8/9/2011	2:33:40 PM	BCl3 MFC set to  0.000000
8/9/2011	2:33:40 PM	PHl3 MFC set to  0.000000
8/9/2011	2:33:40 PM	SiCl4 MFC set to  0.000000
8/9/2011	2:33:40 PM	Bypass solenoid MFC set to  0.000000
8/9/2011	2:33:40 PM	Tube furnace set to 0
8/9/2011	2:33:40 PM	Helium valve closed
8/9/2011	2:33:40 PM	H2 valve closed
8/9/2011	2:33:40 PM	BCl3 valve closed
8/9/2011	2:33:40 PM	PH3 valve closed
8/9/2011	2:33:40 PM	SiCl4 pre valve closed
8/9/2011	2:33:40 PM	SiCl4 post valve closed
8/9/2011	2:33:40 PM	Main Vac valve closed
8/9/2011	2:33:40 PM	Bypass valve closed
8/9/2011	2:33:40 PM	Bubbler valve closed
8/9/2011	2:33:40 PM	Helium MFC set to  0.000000
8/9/2011	2:33:40 PM	H2 MFC set to  0.000000
8/9/2011	2:33:40 PM	BCl3 MFC set to  0.000000
8/9/2011	2:33:40 PM	PHl3 MFC set to  0.000000
8/9/2011	2:33:40 PM	SiCl4 MFC set to  0.000000
8/9/2011	2:33:40 PM	Bypass solenoid MFC set to  0.000000
8/9/2011	2:33:40 PM	Tube furnace set to 0
8/9/2011	2:33:41 PM	Run finished at 2:33 PM
8/9/2011	2:33:41 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/9/2011	3:02:44 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/9/2011	3:02:45 PM	Recipe started at 3:02 PM
8/9/2011	3:02:45 PM	Helium valve closed
8/9/2011	3:02:45 PM	H2 valve closed
8/9/2011	3:02:45 PM	BCl3 valve closed
8/9/2011	3:02:45 PM	PH3 valve closed
8/9/2011	3:02:45 PM	SiCl4 pre valve closed
8/9/2011	3:02:45 PM	SiCl4 post valve closed
8/9/2011	3:02:45 PM	Main Vac valve closed
8/9/2011	3:02:45 PM	Bubbler valve closed
8/9/2011	3:02:45 PM	Bypass valve opened
8/9/2011	3:02:45 PM	Helium MFC set to  0.000000
8/9/2011	3:02:45 PM	H2 MFC set to  0.000000
8/9/2011	3:02:45 PM	BCl3 MFC set to  0.000000
8/9/2011	3:02:45 PM	PHl3 MFC set to  0.000000
8/9/2011	3:02:45 PM	SiCl4 MFC set to  0.000000
8/9/2011	3:02:45 PM	Bypass solenoid MFC set to  0.000000
8/9/2011	3:02:45 PM	Tube furnace set to 0
8/9/2011	3:04:12 PM	Helium valve closed
8/9/2011	3:04:12 PM	H2 valve closed
8/9/2011	3:04:12 PM	BCl3 valve closed
8/9/2011	3:04:12 PM	PH3 valve closed
8/9/2011	3:04:12 PM	SiCl4 pre valve closed
8/9/2011	3:04:12 PM	SiCl4 post valve closed
8/9/2011	3:04:12 PM	Main Vac valve closed
8/9/2011	3:04:12 PM	Bubbler valve closed
8/9/2011	3:04:12 PM	Bypass valve opened
8/9/2011	3:04:12 PM	Helium MFC set to  0.000000
8/9/2011	3:04:12 PM	H2 MFC set to  0.000000
8/9/2011	3:04:12 PM	BCl3 MFC set to  0.000000
8/9/2011	3:04:12 PM	PHl3 MFC set to  0.000000
8/9/2011	3:04:12 PM	SiCl4 MFC set to  0.000000
8/9/2011	3:04:12 PM	Bypass solenoid MFC set to  0.000000
8/9/2011	3:04:12 PM	Tube furnace set to 0
8/9/2011	3:05:12 PM	Helium valve closed
8/9/2011	3:05:12 PM	H2 valve closed
8/9/2011	3:05:12 PM	BCl3 valve closed
8/9/2011	3:05:12 PM	PH3 valve closed
8/9/2011	3:05:12 PM	SiCl4 pre valve closed
8/9/2011	3:05:12 PM	SiCl4 post valve closed
8/9/2011	3:05:12 PM	Bypass valve closed
8/9/2011	3:05:12 PM	Bubbler valve closed
8/9/2011	3:05:12 PM	Main Vac valve opened
8/9/2011	3:05:12 PM	Helium MFC set to  0.000000
8/9/2011	3:05:12 PM	H2 MFC set to  0.000000
8/9/2011	3:05:12 PM	BCl3 MFC set to  0.000000
8/9/2011	3:05:12 PM	PHl3 MFC set to  0.000000
8/9/2011	3:05:12 PM	SiCl4 MFC set to  0.000000
8/9/2011	3:05:12 PM	Bypass solenoid MFC set to  0.000000
8/9/2011	3:05:12 PM	Tube furnace set to 0
8/9/2011	3:05:13 PM	Run finished at 3:05 PM
8/9/2011	3:05:13 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/9/2011	3:06:01 PM	Recipe started at 3:05 PM
8/9/2011	3:06:01 PM	Helium valve closed
8/9/2011	3:06:01 PM	H2 valve closed
8/9/2011	3:06:01 PM	BCl3 valve closed
8/9/2011	3:06:01 PM	PH3 valve closed
8/9/2011	3:06:01 PM	SiCl4 pre valve closed
8/9/2011	3:06:01 PM	SiCl4 post valve closed
8/9/2011	3:06:01 PM	Bypass valve closed
8/9/2011	3:06:01 PM	Bubbler valve closed
8/9/2011	3:06:01 PM	Main Vac valve opened
8/9/2011	3:06:01 PM	Helium MFC set to  0.000000
8/9/2011	3:06:01 PM	H2 MFC set to  0.000000
8/9/2011	3:06:01 PM	BCl3 MFC set to  0.000000
8/9/2011	3:06:01 PM	PHl3 MFC set to  0.000000
8/9/2011	3:06:01 PM	SiCl4 MFC set to  0.000000
8/9/2011	3:06:01 PM	Bypass solenoid MFC set to  0.000000
8/9/2011	3:06:02 PM	Tube furnace set to 100
8/9/2011	3:06:32 PM	H2 valve closed
8/9/2011	3:06:32 PM	BCl3 valve closed
8/9/2011	3:06:32 PM	PH3 valve closed
8/9/2011	3:06:32 PM	SiCl4 pre valve closed
8/9/2011	3:06:32 PM	SiCl4 post valve closed
8/9/2011	3:06:32 PM	Bypass valve closed
8/9/2011	3:06:32 PM	Bubbler valve closed
8/9/2011	3:06:32 PM	Helium valve opened
8/9/2011	3:06:32 PM	Main Vac valve opened
8/9/2011	3:06:32 PM	Helium MFC set to  20.000000
8/9/2011	3:06:32 PM	H2 MFC set to  0.000000
8/9/2011	3:06:32 PM	BCl3 MFC set to  0.000000
8/9/2011	3:06:32 PM	PHl3 MFC set to  0.000000
8/9/2011	3:06:32 PM	SiCl4 MFC set to  0.000000
8/9/2011	3:06:32 PM	Bypass solenoid MFC set to  0.000000
8/9/2011	3:06:32 PM	Tube furnace set to 100
8/9/2011	3:07:02 PM	Helium valve closed
8/9/2011	3:07:02 PM	H2 valve closed
8/9/2011	3:07:02 PM	BCl3 valve closed
8/9/2011	3:07:02 PM	PH3 valve closed
8/9/2011	3:07:02 PM	SiCl4 pre valve closed
8/9/2011	3:07:02 PM	SiCl4 post valve closed
8/9/2011	3:07:02 PM	Bypass valve closed
8/9/2011	3:07:02 PM	Bubbler valve closed
8/9/2011	3:07:02 PM	Main Vac valve opened
8/9/2011	3:07:02 PM	Helium MFC set to  0.000000
8/9/2011	3:07:02 PM	H2 MFC set to  0.000000
8/9/2011	3:07:02 PM	BCl3 MFC set to  0.000000
8/9/2011	3:07:02 PM	PHl3 MFC set to  0.000000
8/9/2011	3:07:02 PM	SiCl4 MFC set to  0.000000
8/9/2011	3:07:02 PM	Bypass solenoid MFC set to  0.000000
8/9/2011	3:07:02 PM	Tube furnace set to 100
8/9/2011	3:07:32 PM	H2 valve closed
8/9/2011	3:07:32 PM	BCl3 valve closed
8/9/2011	3:07:32 PM	PH3 valve closed
8/9/2011	3:07:32 PM	SiCl4 pre valve closed
8/9/2011	3:07:32 PM	SiCl4 post valve closed
8/9/2011	3:07:32 PM	Bypass valve closed
8/9/2011	3:07:32 PM	Bubbler valve closed
8/9/2011	3:07:32 PM	Helium valve opened
8/9/2011	3:07:32 PM	Main Vac valve opened
8/9/2011	3:07:32 PM	Helium MFC set to  20.000000
8/9/2011	3:07:32 PM	H2 MFC set to  0.000000
8/9/2011	3:07:32 PM	BCl3 MFC set to  0.000000
8/9/2011	3:07:32 PM	PHl3 MFC set to  0.000000
8/9/2011	3:07:32 PM	SiCl4 MFC set to  0.000000
8/9/2011	3:07:32 PM	Bypass solenoid MFC set to  0.000000
8/9/2011	3:07:32 PM	Tube furnace set to 100
8/9/2011	3:08:02 PM	Helium valve closed
8/9/2011	3:08:02 PM	H2 valve closed
8/9/2011	3:08:02 PM	BCl3 valve closed
8/9/2011	3:08:02 PM	PH3 valve closed
8/9/2011	3:08:02 PM	SiCl4 pre valve closed
8/9/2011	3:08:02 PM	SiCl4 post valve closed
8/9/2011	3:08:02 PM	Bypass valve closed
8/9/2011	3:08:02 PM	Bubbler valve closed
8/9/2011	3:08:02 PM	Main Vac valve opened
8/9/2011	3:08:02 PM	Helium MFC set to  0.000000
8/9/2011	3:08:02 PM	H2 MFC set to  0.000000
8/9/2011	3:08:02 PM	BCl3 MFC set to  0.000000
8/9/2011	3:08:02 PM	PHl3 MFC set to  0.000000
8/9/2011	3:08:02 PM	SiCl4 MFC set to  0.000000
8/9/2011	3:08:02 PM	Bypass solenoid MFC set to  0.000000
8/9/2011	3:08:02 PM	Tube furnace set to 100
8/9/2011	3:08:32 PM	H2 valve closed
8/9/2011	3:08:32 PM	BCl3 valve closed
8/9/2011	3:08:32 PM	PH3 valve closed
8/9/2011	3:08:32 PM	SiCl4 pre valve closed
8/9/2011	3:08:32 PM	SiCl4 post valve closed
8/9/2011	3:08:32 PM	Bypass valve closed
8/9/2011	3:08:32 PM	Bubbler valve closed
8/9/2011	3:08:32 PM	Helium valve opened
8/9/2011	3:08:32 PM	Main Vac valve opened
8/9/2011	3:08:32 PM	Helium MFC set to  20.000000
8/9/2011	3:08:32 PM	H2 MFC set to  0.000000
8/9/2011	3:08:32 PM	BCl3 MFC set to  0.000000
8/9/2011	3:08:32 PM	PHl3 MFC set to  0.000000
8/9/2011	3:08:32 PM	SiCl4 MFC set to  0.000000
8/9/2011	3:08:32 PM	Bypass solenoid MFC set to  0.000000
8/9/2011	3:08:33 PM	Tube furnace set to 100
8/9/2011	3:09:03 PM	Helium valve closed
8/9/2011	3:09:03 PM	H2 valve closed
8/9/2011	3:09:03 PM	BCl3 valve closed
8/9/2011	3:09:03 PM	PH3 valve closed
8/9/2011	3:09:03 PM	SiCl4 pre valve closed
8/9/2011	3:09:03 PM	SiCl4 post valve closed
8/9/2011	3:09:03 PM	Bypass valve closed
8/9/2011	3:09:03 PM	Bubbler valve closed
8/9/2011	3:09:03 PM	Main Vac valve opened
8/9/2011	3:09:03 PM	Helium MFC set to  0.000000
8/9/2011	3:09:03 PM	H2 MFC set to  0.000000
8/9/2011	3:09:03 PM	BCl3 MFC set to  0.000000
8/9/2011	3:09:03 PM	PHl3 MFC set to  0.000000
8/9/2011	3:09:03 PM	SiCl4 MFC set to  0.000000
8/9/2011	3:09:03 PM	Bypass solenoid MFC set to  0.000000
8/9/2011	3:09:03 PM	Tube furnace set to 100
8/9/2011	3:09:33 PM	H2 valve closed
8/9/2011	3:09:33 PM	BCl3 valve closed
8/9/2011	3:09:33 PM	PH3 valve closed
8/9/2011	3:09:33 PM	SiCl4 pre valve closed
8/9/2011	3:09:33 PM	SiCl4 post valve closed
8/9/2011	3:09:33 PM	Bypass valve closed
8/9/2011	3:09:33 PM	Bubbler valve closed
8/9/2011	3:09:33 PM	Helium valve opened
8/9/2011	3:09:33 PM	Main Vac valve opened
8/9/2011	3:09:33 PM	Helium MFC set to  20.000000
8/9/2011	3:09:33 PM	H2 MFC set to  0.000000
8/9/2011	3:09:33 PM	BCl3 MFC set to  0.000000
8/9/2011	3:09:33 PM	PHl3 MFC set to  0.000000
8/9/2011	3:09:33 PM	SiCl4 MFC set to  0.000000
8/9/2011	3:09:33 PM	Bypass solenoid MFC set to  0.000000
8/9/2011	3:09:33 PM	Tube furnace set to 100
8/9/2011	3:10:03 PM	Helium valve closed
8/9/2011	3:10:03 PM	H2 valve closed
8/9/2011	3:10:03 PM	BCl3 valve closed
8/9/2011	3:10:03 PM	PH3 valve closed
8/9/2011	3:10:03 PM	SiCl4 pre valve closed
8/9/2011	3:10:03 PM	SiCl4 post valve closed
8/9/2011	3:10:03 PM	Bypass valve closed
8/9/2011	3:10:03 PM	Bubbler valve closed
8/9/2011	3:10:03 PM	Main Vac valve opened
8/9/2011	3:10:03 PM	Helium MFC set to  0.000000
8/9/2011	3:10:03 PM	H2 MFC set to  0.000000
8/9/2011	3:10:03 PM	BCl3 MFC set to  0.000000
8/9/2011	3:10:03 PM	PHl3 MFC set to  0.000000
8/9/2011	3:10:03 PM	SiCl4 MFC set to  0.000000
8/9/2011	3:10:03 PM	Bypass solenoid MFC set to  0.000000
8/9/2011	3:10:03 PM	Tube furnace set to 100
8/9/2011	3:10:33 PM	H2 valve closed
8/9/2011	3:10:33 PM	BCl3 valve closed
8/9/2011	3:10:33 PM	PH3 valve closed
8/9/2011	3:10:33 PM	SiCl4 pre valve closed
8/9/2011	3:10:33 PM	SiCl4 post valve closed
8/9/2011	3:10:33 PM	Bypass valve closed
8/9/2011	3:10:33 PM	Bubbler valve closed
8/9/2011	3:10:33 PM	Helium valve opened
8/9/2011	3:10:33 PM	Main Vac valve opened
8/9/2011	3:10:33 PM	Helium MFC set to  20.000000
8/9/2011	3:10:33 PM	H2 MFC set to  0.000000
8/9/2011	3:10:33 PM	BCl3 MFC set to  0.000000
8/9/2011	3:10:33 PM	PHl3 MFC set to  0.000000
8/9/2011	3:10:33 PM	SiCl4 MFC set to  0.000000
8/9/2011	3:10:33 PM	Bypass solenoid MFC set to  0.000000
8/9/2011	3:10:33 PM	Tube furnace set to 100
8/9/2011	3:11:03 PM	Helium valve closed
8/9/2011	3:11:03 PM	H2 valve closed
8/9/2011	3:11:03 PM	BCl3 valve closed
8/9/2011	3:11:03 PM	PH3 valve closed
8/9/2011	3:11:03 PM	SiCl4 pre valve closed
8/9/2011	3:11:03 PM	SiCl4 post valve closed
8/9/2011	3:11:03 PM	Bypass valve closed
8/9/2011	3:11:03 PM	Bubbler valve closed
8/9/2011	3:11:03 PM	Main Vac valve opened
8/9/2011	3:11:03 PM	Helium MFC set to  0.000000
8/9/2011	3:11:03 PM	H2 MFC set to  0.000000
8/9/2011	3:11:03 PM	BCl3 MFC set to  0.000000
8/9/2011	3:11:03 PM	PHl3 MFC set to  0.000000
8/9/2011	3:11:03 PM	SiCl4 MFC set to  0.000000
8/9/2011	3:11:03 PM	Bypass solenoid MFC set to  0.000000
8/9/2011	3:11:04 PM	Tube furnace set to 100
8/9/2011	3:11:34 PM	H2 valve closed
8/9/2011	3:11:34 PM	BCl3 valve closed
8/9/2011	3:11:34 PM	PH3 valve closed
8/9/2011	3:11:34 PM	SiCl4 pre valve closed
8/9/2011	3:11:34 PM	SiCl4 post valve closed
8/9/2011	3:11:34 PM	Bypass valve closed
8/9/2011	3:11:34 PM	Bubbler valve closed
8/9/2011	3:11:34 PM	Helium valve opened
8/9/2011	3:11:34 PM	Main Vac valve opened
8/9/2011	3:11:34 PM	Helium MFC set to  20.000000
8/9/2011	3:11:34 PM	H2 MFC set to  0.000000
8/9/2011	3:11:34 PM	BCl3 MFC set to  0.000000
8/9/2011	3:11:34 PM	PHl3 MFC set to  0.000000
8/9/2011	3:11:34 PM	SiCl4 MFC set to  0.000000
8/9/2011	3:11:34 PM	Bypass solenoid MFC set to  0.000000
8/9/2011	3:11:34 PM	Tube furnace set to 100
8/9/2011	3:12:04 PM	Helium valve closed
8/9/2011	3:12:04 PM	H2 valve closed
8/9/2011	3:12:04 PM	BCl3 valve closed
8/9/2011	3:12:04 PM	PH3 valve closed
8/9/2011	3:12:04 PM	SiCl4 pre valve closed
8/9/2011	3:12:04 PM	SiCl4 post valve closed
8/9/2011	3:12:04 PM	Bypass valve closed
8/9/2011	3:12:04 PM	Bubbler valve closed
8/9/2011	3:12:04 PM	Main Vac valve opened
8/9/2011	3:12:04 PM	Helium MFC set to  0.000000
8/9/2011	3:12:04 PM	H2 MFC set to  0.000000
8/9/2011	3:12:04 PM	BCl3 MFC set to  0.000000
8/9/2011	3:12:04 PM	PHl3 MFC set to  0.000000
8/9/2011	3:12:04 PM	SiCl4 MFC set to  0.000000
8/9/2011	3:12:04 PM	Bypass solenoid MFC set to  0.000000
8/9/2011	3:12:04 PM	Tube furnace set to 100
8/9/2011	3:12:34 PM	H2 valve closed
8/9/2011	3:12:34 PM	BCl3 valve closed
8/9/2011	3:12:34 PM	PH3 valve closed
8/9/2011	3:12:34 PM	SiCl4 pre valve closed
8/9/2011	3:12:34 PM	SiCl4 post valve closed
8/9/2011	3:12:34 PM	Bypass valve closed
8/9/2011	3:12:34 PM	Bubbler valve closed
8/9/2011	3:12:34 PM	Helium valve opened
8/9/2011	3:12:34 PM	Main Vac valve opened
8/9/2011	3:12:34 PM	Helium MFC set to  20.000000
8/9/2011	3:12:34 PM	H2 MFC set to  0.000000
8/9/2011	3:12:34 PM	BCl3 MFC set to  0.000000
8/9/2011	3:12:34 PM	PHl3 MFC set to  0.000000
8/9/2011	3:12:34 PM	SiCl4 MFC set to  0.000000
8/9/2011	3:12:34 PM	Bypass solenoid MFC set to  0.000000
8/9/2011	3:12:34 PM	Tube furnace set to 100
8/9/2011	3:13:04 PM	Helium valve closed
8/9/2011	3:13:04 PM	H2 valve closed
8/9/2011	3:13:04 PM	BCl3 valve closed
8/9/2011	3:13:04 PM	PH3 valve closed
8/9/2011	3:13:04 PM	SiCl4 pre valve closed
8/9/2011	3:13:04 PM	SiCl4 post valve closed
8/9/2011	3:13:04 PM	Bypass valve closed
8/9/2011	3:13:04 PM	Bubbler valve closed
8/9/2011	3:13:04 PM	Main Vac valve opened
8/9/2011	3:13:04 PM	Helium MFC set to  0.000000
8/9/2011	3:13:04 PM	H2 MFC set to  0.000000
8/9/2011	3:13:04 PM	BCl3 MFC set to  0.000000
8/9/2011	3:13:04 PM	PHl3 MFC set to  0.000000
8/9/2011	3:13:04 PM	SiCl4 MFC set to  0.000000
8/9/2011	3:13:04 PM	Bypass solenoid MFC set to  0.000000
8/9/2011	3:13:04 PM	Tube furnace set to 100
8/9/2011	3:13:35 PM	H2 valve closed
8/9/2011	3:13:35 PM	BCl3 valve closed
8/9/2011	3:13:35 PM	PH3 valve closed
8/9/2011	3:13:35 PM	SiCl4 pre valve closed
8/9/2011	3:13:35 PM	SiCl4 post valve closed
8/9/2011	3:13:35 PM	Bypass valve closed
8/9/2011	3:13:35 PM	Bubbler valve closed
8/9/2011	3:13:35 PM	Helium valve opened
8/9/2011	3:13:35 PM	Main Vac valve opened
8/9/2011	3:13:35 PM	Helium MFC set to  20.000000
8/9/2011	3:13:35 PM	H2 MFC set to  0.000000
8/9/2011	3:13:35 PM	BCl3 MFC set to  0.000000
8/9/2011	3:13:35 PM	PHl3 MFC set to  0.000000
8/9/2011	3:13:35 PM	SiCl4 MFC set to  0.000000
8/9/2011	3:13:35 PM	Bypass solenoid MFC set to  0.000000
8/9/2011	3:13:35 PM	Tube furnace set to 100
8/9/2011	3:14:05 PM	Helium valve closed
8/9/2011	3:14:05 PM	H2 valve closed
8/9/2011	3:14:05 PM	BCl3 valve closed
8/9/2011	3:14:05 PM	PH3 valve closed
8/9/2011	3:14:05 PM	SiCl4 pre valve closed
8/9/2011	3:14:05 PM	SiCl4 post valve closed
8/9/2011	3:14:05 PM	Bypass valve closed
8/9/2011	3:14:05 PM	Bubbler valve closed
8/9/2011	3:14:05 PM	Main Vac valve opened
8/9/2011	3:14:05 PM	Helium MFC set to  0.000000
8/9/2011	3:14:05 PM	H2 MFC set to  0.000000
8/9/2011	3:14:05 PM	BCl3 MFC set to  0.000000
8/9/2011	3:14:05 PM	PHl3 MFC set to  0.000000
8/9/2011	3:14:05 PM	SiCl4 MFC set to  0.000000
8/9/2011	3:14:05 PM	Bypass solenoid MFC set to  0.000000
8/9/2011	3:14:05 PM	Tube furnace set to 100
8/9/2011	3:14:35 PM	H2 valve closed
8/9/2011	3:14:35 PM	BCl3 valve closed
8/9/2011	3:14:35 PM	PH3 valve closed
8/9/2011	3:14:35 PM	SiCl4 pre valve closed
8/9/2011	3:14:35 PM	SiCl4 post valve closed
8/9/2011	3:14:35 PM	Bypass valve closed
8/9/2011	3:14:35 PM	Bubbler valve closed
8/9/2011	3:14:35 PM	Helium valve opened
8/9/2011	3:14:35 PM	Main Vac valve opened
8/9/2011	3:14:35 PM	Helium MFC set to  20.000000
8/9/2011	3:14:35 PM	H2 MFC set to  0.000000
8/9/2011	3:14:35 PM	BCl3 MFC set to  0.000000
8/9/2011	3:14:35 PM	PHl3 MFC set to  0.000000
8/9/2011	3:14:35 PM	SiCl4 MFC set to  0.000000
8/9/2011	3:14:35 PM	Bypass solenoid MFC set to  0.000000
8/9/2011	3:14:35 PM	Tube furnace set to 100
8/9/2011	3:15:05 PM	Helium valve closed
8/9/2011	3:15:05 PM	H2 valve closed
8/9/2011	3:15:05 PM	BCl3 valve closed
8/9/2011	3:15:05 PM	PH3 valve closed
8/9/2011	3:15:05 PM	SiCl4 pre valve closed
8/9/2011	3:15:05 PM	SiCl4 post valve closed
8/9/2011	3:15:05 PM	Bypass valve closed
8/9/2011	3:15:05 PM	Bubbler valve closed
8/9/2011	3:15:05 PM	Main Vac valve opened
8/9/2011	3:15:05 PM	Helium MFC set to  0.000000
8/9/2011	3:15:05 PM	H2 MFC set to  0.000000
8/9/2011	3:15:05 PM	BCl3 MFC set to  0.000000
8/9/2011	3:15:05 PM	PHl3 MFC set to  0.000000
8/9/2011	3:15:05 PM	SiCl4 MFC set to  0.000000
8/9/2011	3:15:05 PM	Bypass solenoid MFC set to  0.000000
8/9/2011	3:15:05 PM	Tube furnace set to 100
8/9/2011	3:15:35 PM	H2 valve closed
8/9/2011	3:15:35 PM	BCl3 valve closed
8/9/2011	3:15:35 PM	PH3 valve closed
8/9/2011	3:15:35 PM	SiCl4 pre valve closed
8/9/2011	3:15:35 PM	SiCl4 post valve closed
8/9/2011	3:15:35 PM	Bypass valve closed
8/9/2011	3:15:35 PM	Bubbler valve closed
8/9/2011	3:15:35 PM	Helium valve opened
8/9/2011	3:15:35 PM	Main Vac valve opened
8/9/2011	3:15:35 PM	Helium MFC set to  20.000000
8/9/2011	3:15:35 PM	H2 MFC set to  0.000000
8/9/2011	3:15:35 PM	BCl3 MFC set to  0.000000
8/9/2011	3:15:35 PM	PHl3 MFC set to  0.000000
8/9/2011	3:15:35 PM	SiCl4 MFC set to  0.000000
8/9/2011	3:15:35 PM	Bypass solenoid MFC set to  0.000000
8/9/2011	3:15:36 PM	Tube furnace set to 100
8/9/2011	3:16:06 PM	Helium valve closed
8/9/2011	3:16:06 PM	H2 valve closed
8/9/2011	3:16:06 PM	BCl3 valve closed
8/9/2011	3:16:06 PM	PH3 valve closed
8/9/2011	3:16:06 PM	SiCl4 pre valve closed
8/9/2011	3:16:06 PM	SiCl4 post valve closed
8/9/2011	3:16:06 PM	Bypass valve closed
8/9/2011	3:16:06 PM	Bubbler valve closed
8/9/2011	3:16:06 PM	Main Vac valve opened
8/9/2011	3:16:06 PM	Helium MFC set to  0.000000
8/9/2011	3:16:06 PM	H2 MFC set to  0.000000
8/9/2011	3:16:06 PM	BCl3 MFC set to  0.000000
8/9/2011	3:16:06 PM	PHl3 MFC set to  0.000000
8/9/2011	3:16:06 PM	SiCl4 MFC set to  0.000000
8/9/2011	3:16:06 PM	Bypass solenoid MFC set to  0.000000
8/9/2011	3:16:06 PM	Tube furnace set to 100
8/9/2011	3:16:07 PM	Run finished at 3:16 PM
8/9/2011	3:17:01 PM	Recipe started at 3:17 PM
8/9/2011	3:17:01 PM	Helium valve closed
8/9/2011	3:17:01 PM	H2 valve closed
8/9/2011	3:17:01 PM	BCl3 valve closed
8/9/2011	3:17:01 PM	PH3 valve closed
8/9/2011	3:17:01 PM	SiCl4 pre valve closed
8/9/2011	3:17:01 PM	SiCl4 post valve closed
8/9/2011	3:17:01 PM	Main Vac valve closed
8/9/2011	3:17:01 PM	Bypass valve closed
8/9/2011	3:17:01 PM	Bubbler valve closed
8/9/2011	3:17:01 PM	Helium MFC set to  0.000000
8/9/2011	3:17:01 PM	H2 MFC set to  0.000000
8/9/2011	3:17:01 PM	BCl3 MFC set to  0.000000
8/9/2011	3:17:01 PM	PHl3 MFC set to  0.000000
8/9/2011	3:17:01 PM	SiCl4 MFC set to  0.000000
8/9/2011	3:17:01 PM	Bypass solenoid MFC set to  0.000000
8/9/2011	3:17:02 PM	Tube furnace set to 0
8/9/2011	3:17:05 PM	Helium valve closed
8/9/2011	3:17:05 PM	BCl3 valve closed
8/9/2011	3:17:05 PM	PH3 valve closed
8/9/2011	3:17:05 PM	SiCl4 pre valve closed
8/9/2011	3:17:05 PM	SiCl4 post valve closed
8/9/2011	3:17:05 PM	Main Vac valve closed
8/9/2011	3:17:05 PM	Bypass valve closed
8/9/2011	3:17:05 PM	Bubbler valve closed
8/9/2011	3:17:05 PM	H2 valve opened
8/9/2011	3:17:05 PM	Helium MFC set to  0.000000
8/9/2011	3:17:05 PM	H2 MFC set to  500.000000
8/9/2011	3:17:05 PM	BCl3 MFC set to  0.000000
8/9/2011	3:17:05 PM	PHl3 MFC set to  0.000000
8/9/2011	3:17:05 PM	SiCl4 MFC set to  0.000000
8/9/2011	3:17:05 PM	Bypass solenoid MFC set to  0.000000
8/9/2011	3:17:05 PM	Tube furnace set to 0
8/9/2011	3:21:06 PM	Helium valve closed
8/9/2011	3:21:06 PM	BCl3 valve closed
8/9/2011	3:21:06 PM	PH3 valve closed
8/9/2011	3:21:07 PM	SiCl4 pre valve closed
8/9/2011	3:21:07 PM	SiCl4 post valve closed
8/9/2011	3:21:07 PM	Main Vac valve closed
8/9/2011	3:21:07 PM	Bypass valve closed
8/9/2011	3:21:07 PM	H2 valve opened
8/9/2011	3:21:07 PM	Bubbler valve opened
8/9/2011	3:21:07 PM	Helium MFC set to  0.000000
8/9/2011	3:21:07 PM	H2 MFC set to  500.000000
8/9/2011	3:21:07 PM	BCl3 MFC set to  0.000000
8/9/2011	3:21:07 PM	PHl3 MFC set to  0.000000
8/9/2011	3:21:07 PM	SiCl4 MFC set to  0.000000
8/9/2011	3:21:07 PM	Bypass solenoid MFC set to  0.000000
8/9/2011	3:21:07 PM	Tube furnace set to 0
8/9/2011	3:21:08 PM	Helium valve closed
8/9/2011	3:21:08 PM	BCl3 valve closed
8/9/2011	3:21:08 PM	PH3 valve closed
8/9/2011	3:21:08 PM	SiCl4 pre valve closed
8/9/2011	3:21:08 PM	SiCl4 post valve closed
8/9/2011	3:21:08 PM	Main Vac valve closed
8/9/2011	3:21:08 PM	Bypass valve closed
8/9/2011	3:21:08 PM	H2 valve opened
8/9/2011	3:21:08 PM	Bubbler valve opened
8/9/2011	3:21:08 PM	Helium MFC set to  0.000000
8/9/2011	3:21:08 PM	H2 MFC set to  500.000000
8/9/2011	3:21:08 PM	BCl3 MFC set to  0.000000
8/9/2011	3:21:08 PM	PHl3 MFC set to  0.000000
8/9/2011	3:21:08 PM	SiCl4 MFC set to  0.000000
8/9/2011	3:21:08 PM	Bypass solenoid MFC set to  0.000000
8/9/2011	3:21:08 PM	Tube furnace set to 1000
8/9/2011	3:41:08 PM	Helium valve closed
8/9/2011	3:41:08 PM	PH3 valve closed
8/9/2011	3:41:08 PM	Main Vac valve closed
8/9/2011	3:41:08 PM	Bypass valve closed
8/9/2011	3:41:08 PM	H2 valve opened
8/9/2011	3:41:08 PM	BCl3 valve opened
8/9/2011	3:41:08 PM	SiCl4 pre valve opened
8/9/2011	3:41:08 PM	SiCl4 post valve opened
8/9/2011	3:41:08 PM	Bubbler valve opened
8/9/2011	3:41:08 PM	Helium MFC set to  0.000000
8/9/2011	3:41:08 PM	H2 MFC set to  500.000000
8/9/2011	3:41:08 PM	BCl3 MFC set to  2.300000
8/9/2011	3:41:08 PM	PHl3 MFC set to  0.000000
8/9/2011	3:41:08 PM	SiCl4 MFC set to  50.000000
8/9/2011	3:41:08 PM	Bypass solenoid MFC set to  0.000000
8/9/2011	3:41:08 PM	Tube furnace set to 1000
8/9/2011	3:57:08 PM	Helium valve closed
8/9/2011	3:57:08 PM	BCl3 valve closed
8/9/2011	3:57:08 PM	PH3 valve closed
8/9/2011	3:57:08 PM	SiCl4 pre valve closed
8/9/2011	3:57:08 PM	SiCl4 post valve closed
8/9/2011	3:57:08 PM	Main Vac valve closed
8/9/2011	3:57:08 PM	Bypass valve closed
8/9/2011	3:57:08 PM	H2 valve opened
8/9/2011	3:57:08 PM	Bubbler valve opened
8/9/2011	3:57:08 PM	Helium MFC set to  0.000000
8/9/2011	3:57:08 PM	H2 MFC set to  500.000000
8/9/2011	3:57:08 PM	BCl3 MFC set to  0.000000
8/9/2011	3:57:08 PM	PHl3 MFC set to  0.000000
8/9/2011	3:57:08 PM	SiCl4 MFC set to  0.000000
8/9/2011	3:57:08 PM	Bypass solenoid MFC set to  0.000000
8/9/2011	3:57:08 PM	Tube furnace set to 750
8/9/2011	4:02:08 PM	H2 valve closed
8/9/2011	4:02:08 PM	BCl3 valve closed
8/9/2011	4:02:08 PM	PH3 valve closed
8/9/2011	4:02:08 PM	SiCl4 pre valve closed
8/9/2011	4:02:08 PM	SiCl4 post valve closed
8/9/2011	4:02:08 PM	Main Vac valve closed
8/9/2011	4:02:08 PM	Bypass valve closed
8/9/2011	4:02:08 PM	Helium valve opened
8/9/2011	4:02:08 PM	Bubbler valve opened
8/9/2011	4:02:08 PM	Helium MFC set to  500.000000
8/9/2011	4:02:08 PM	H2 MFC set to  0.000000
8/9/2011	4:02:08 PM	BCl3 MFC set to  0.000000
8/9/2011	4:02:08 PM	PHl3 MFC set to  0.000000
8/9/2011	4:02:08 PM	SiCl4 MFC set to  0.000000
8/9/2011	4:02:08 PM	Bypass solenoid MFC set to  0.000000
8/9/2011	4:02:08 PM	Tube furnace set to 0
8/9/2011	4:22:08 PM	Helium valve closed
8/9/2011	4:22:08 PM	H2 valve closed
8/9/2011	4:22:08 PM	BCl3 valve closed
8/9/2011	4:22:08 PM	PH3 valve closed
8/9/2011	4:22:08 PM	SiCl4 pre valve closed
8/9/2011	4:22:08 PM	SiCl4 post valve closed
8/9/2011	4:22:08 PM	Main Vac valve closed
8/9/2011	4:22:08 PM	Bypass valve closed
8/9/2011	4:22:08 PM	Bubbler valve closed
8/9/2011	4:22:08 PM	Helium MFC set to  0.000000
8/9/2011	4:22:08 PM	H2 MFC set to  0.000000
8/9/2011	4:22:08 PM	BCl3 MFC set to  0.000000
8/9/2011	4:22:08 PM	PHl3 MFC set to  0.000000
8/9/2011	4:22:08 PM	SiCl4 MFC set to  0.000000
8/9/2011	4:22:08 PM	Bypass solenoid MFC set to  0.000000
8/9/2011	4:22:08 PM	Tube furnace set to 0
8/9/2011	4:22:09 PM	Run finished at 4:22 PM
8/9/2011	4:24:03 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/9/2011	4:24:04 PM	Recipe started at 4:24 PM
8/9/2011	4:24:04 PM	Helium valve closed
8/9/2011	4:24:04 PM	H2 valve closed
8/9/2011	4:24:04 PM	BCl3 valve closed
8/9/2011	4:24:04 PM	PH3 valve closed
8/9/2011	4:24:04 PM	SiCl4 pre valve closed
8/9/2011	4:24:04 PM	SiCl4 post valve closed
8/9/2011	4:24:04 PM	Main Vac valve closed
8/9/2011	4:24:04 PM	Bypass valve closed
8/9/2011	4:24:04 PM	Bubbler valve closed
8/9/2011	4:24:04 PM	Helium MFC set to  0.000000
8/9/2011	4:24:04 PM	H2 MFC set to  0.000000
8/9/2011	4:24:04 PM	BCl3 MFC set to  0.000000
8/9/2011	4:24:04 PM	PHl3 MFC set to  0.000000
8/9/2011	4:24:04 PM	SiCl4 MFC set to  0.000000
8/9/2011	4:24:04 PM	Bypass solenoid MFC set to  0.000000
8/9/2011	4:24:04 PM	Tube furnace set to 0
8/9/2011	4:24:07 PM	H2 valve closed
8/9/2011	4:24:07 PM	BCl3 valve closed
8/9/2011	4:24:07 PM	PH3 valve closed
8/9/2011	4:24:07 PM	SiCl4 pre valve closed
8/9/2011	4:24:07 PM	SiCl4 post valve closed
8/9/2011	4:24:07 PM	Main Vac valve closed
8/9/2011	4:24:07 PM	Bypass valve closed
8/9/2011	4:24:07 PM	Bubbler valve closed
8/9/2011	4:24:07 PM	Helium valve opened
8/9/2011	4:24:07 PM	Helium MFC set to  500.000000
8/9/2011	4:24:07 PM	H2 MFC set to  0.000000
8/9/2011	4:24:07 PM	BCl3 MFC set to  0.000000
8/9/2011	4:24:07 PM	PHl3 MFC set to  0.000000
8/9/2011	4:24:07 PM	SiCl4 MFC set to  0.000000
8/9/2011	4:24:07 PM	Bypass solenoid MFC set to  0.000000
8/9/2011	4:24:07 PM	Tube furnace set to 0
8/9/2011	4:24:08 PM	Helium valve closed
8/9/2011	4:24:08 PM	H2 valve closed
8/9/2011	4:24:08 PM	BCl3 valve closed
8/9/2011	4:24:08 PM	PH3 valve closed
8/9/2011	4:24:08 PM	SiCl4 pre valve closed
8/9/2011	4:24:08 PM	SiCl4 post valve closed
8/9/2011	4:24:08 PM	Main Vac valve closed
8/9/2011	4:24:08 PM	Bypass valve closed
8/9/2011	4:24:08 PM	Bubbler valve closed
8/9/2011	4:24:08 PM	Helium MFC set to  0.000000
8/9/2011	4:24:08 PM	H2 MFC set to  0.000000
8/9/2011	4:24:08 PM	BCl3 MFC set to  0.000000
8/9/2011	4:24:08 PM	PHl3 MFC set to  0.000000
8/9/2011	4:24:08 PM	SiCl4 MFC set to  0.000000
8/9/2011	4:24:08 PM	Bypass solenoid MFC set to  0.000000
8/9/2011	4:24:08 PM	Tube furnace set to 0
8/9/2011	4:24:09 PM	Run finished at 4:24 PM
8/9/2011	4:24:09 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/9/2011	4:27:43 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/9/2011	4:27:43 PM	Recipe started at 4:27 PM
8/9/2011	4:27:43 PM	Helium valve closed
8/9/2011	4:27:43 PM	H2 valve closed
8/9/2011	4:27:43 PM	BCl3 valve closed
8/9/2011	4:27:43 PM	PH3 valve closed
8/9/2011	4:27:43 PM	SiCl4 pre valve closed
8/9/2011	4:27:44 PM	SiCl4 post valve closed
8/9/2011	4:27:44 PM	Main Vac valve closed
8/9/2011	4:27:44 PM	Bubbler valve closed
8/9/2011	4:27:44 PM	Bypass valve opened
8/9/2011	4:27:44 PM	Helium MFC set to  0.000000
8/9/2011	4:27:44 PM	H2 MFC set to  0.000000
8/9/2011	4:27:44 PM	BCl3 MFC set to  0.000000
8/9/2011	4:27:44 PM	PHl3 MFC set to  0.000000
8/9/2011	4:27:44 PM	SiCl4 MFC set to  0.000000
8/9/2011	4:27:44 PM	Bypass solenoid MFC set to  0.000000
8/9/2011	4:27:44 PM	Tube furnace set to 0
8/9/2011	4:28:50 PM	Helium valve closed
8/9/2011	4:28:50 PM	H2 valve closed
8/9/2011	4:28:50 PM	BCl3 valve closed
8/9/2011	4:28:50 PM	PH3 valve closed
8/9/2011	4:28:50 PM	SiCl4 pre valve closed
8/9/2011	4:28:50 PM	SiCl4 post valve closed
8/9/2011	4:28:50 PM	Main Vac valve closed
8/9/2011	4:28:50 PM	Bubbler valve closed
8/9/2011	4:28:50 PM	Bypass valve opened
8/9/2011	4:28:50 PM	Helium MFC set to  0.000000
8/9/2011	4:28:50 PM	H2 MFC set to  0.000000
8/9/2011	4:28:50 PM	BCl3 MFC set to  0.000000
8/9/2011	4:28:50 PM	PHl3 MFC set to  0.000000
8/9/2011	4:28:50 PM	SiCl4 MFC set to  0.000000
8/9/2011	4:28:50 PM	Bypass solenoid MFC set to  0.000000
8/9/2011	4:28:50 PM	Tube furnace set to 0
8/9/2011	4:29:50 PM	Helium valve closed
8/9/2011	4:29:50 PM	H2 valve closed
8/9/2011	4:29:50 PM	BCl3 valve closed
8/9/2011	4:29:50 PM	PH3 valve closed
8/9/2011	4:29:50 PM	SiCl4 pre valve closed
8/9/2011	4:29:50 PM	SiCl4 post valve closed
8/9/2011	4:29:50 PM	Bypass valve closed
8/9/2011	4:29:50 PM	Bubbler valve closed
8/9/2011	4:29:50 PM	Main Vac valve opened
8/9/2011	4:29:50 PM	Helium MFC set to  0.000000
8/9/2011	4:29:50 PM	H2 MFC set to  0.000000
8/9/2011	4:29:50 PM	BCl3 MFC set to  0.000000
8/9/2011	4:29:50 PM	PHl3 MFC set to  0.000000
8/9/2011	4:29:50 PM	SiCl4 MFC set to  0.000000
8/9/2011	4:29:50 PM	Bypass solenoid MFC set to  0.000000
8/9/2011	4:29:50 PM	Tube furnace set to 0
8/9/2011	4:29:51 PM	Run finished at 4:29 PM
8/9/2011	4:29:51 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
